硅基无源集成LC集总滤波器的设计

发布时间：2018-02-10 18:16

本文关键词： 无源集成器件 LC集总滤波器 CoNbZr磁芯平面螺旋电感 HFSS　出处：《电子科技大学》2015年硕士论文　论文类型：学位论文

【摘要】：本文以硅基无源集成器件为研究目标。先从薄膜磁芯材料入手,对CoNbZr软磁薄材料进行研究,设计、制备、测试并优化其性能。然后重点研究了硅基无源平面螺旋电感和硅基LC集总滤波器这两种器件。分别究了二者的设计和计算方法,并用ADS和HFSS进行仿真,分析仿真结果,优化器件性能。本文取得的进展如下:第一,分析论证了集成无源器件研究的特点,并提出本篇论文研究重点,设计硅基无源集成LC滤波器。分析了无源器件工艺技术,并对比其优劣,最终选择了硅基CMOS工艺。第二,研究了磁芯材料的制备。先分析了磁芯材料参数对平面电感性能的影响,选定直流磁控溅射发制备了CoNbZr软磁合金薄膜,并对比了不同制备条件下,软磁薄膜的性能,进而对溅射条件进行了优化,最终得到矫顽力为6.22(Oe),磁导率达到100的CoNbZr软磁薄膜。第三,研究了平面螺旋电感以及MIM电容。先对二者进行模型分析,得到平面螺旋电感以及MIM电容的等效模型。通过对模型的分析,提出电感以及电容参数的计算公式。然后用HFSS软件对两种元器件进行建模仿真,结合硅基CMOS工艺的可行性,设计出电感量为13nH,品质因数达到20的平面空芯螺旋电感,电感量为100nH左右,品质因数达到100的平面磁芯螺旋电感,以及电容量在pF量级,工作频段内品质因数达到10以上的片上电容,可满足集成LC滤波器设计的需求。第四,首先研究了LC集总滤波器的设计方法,并详细介绍了巴特沃斯响应滤波器。根据这一设计思路,利用ADS软件设计了π型低通LC滤波器,并分别用ADS电路模型和HFSS三位电磁场模型进行仿真,对比二者的仿真结果并进行了分析。得到通带截止频率为470MHz,通带损耗小于0.5dB,阻带抑制大于30dB的高频LC低通滤波器。
[Abstract]:In this paper, silicon based passive integrated devices are taken as the research object. Firstly, the thin film magnetic core material is studied, and the soft magnetic thin material of CoNbZr is designed and fabricated. The performance is tested and optimized. Then, two kinds of devices, silicon-based passive planar spiral inductor and silicon-based LC lumped filter, are studied. The design and calculation methods of the two devices are studied, and the simulation results are analyzed by ADS and HFSS. The main achievements of this paper are as follows: first, the characteristics of integrated passive devices are analyzed and demonstrated, and the emphasis of this paper is put forward to design silicon-based passive integrated LC filters. Finally, the silicon-based CMOS process is chosen. Secondly, the preparation of magnetic core material is studied. Firstly, the influence of core material parameters on the performance of planar inductor is analyzed, and CoNbZr soft magnetic alloy thin films are prepared by DC magnetron sputtering. The properties of soft magnetic thin films under different preparation conditions were compared, and the sputtering conditions were optimized. Finally, the coercivity of CoNbZr soft magnetic thin films with a permeability of 100 was obtained. The planar spiral inductors and MIM capacitors are studied. The equivalent models of planar spiral inductors and MIM capacitors are obtained by model analysis. The calculation formulas of inductance and capacitance parameters are put forward, and then two kinds of components are modeled and simulated by HFSS software. Combined with the feasibility of silicon based CMOS process, a planar hollow spiral inductor with an inductance of 13nH and a quality factor of 20 is designed. The inductance is about 100nH, the plane core spiral inductance with a quality factor of 100, and the on-chip capacitance whose capacitance is in the order of PF, and the quality factor is more than 10 in the working frequency band, can meet the needs of the design of integrated LC filter. 4th, Firstly, the design method of LC lumped filter is studied, and the Butterworth response filter is introduced in detail. According to this design idea, 蟺 type low-pass LC filter is designed by using ADS software. The simulation results of ADS circuit model and HFSS three-bit electromagnetic field model are compared and analyzed. A high-frequency LC low-pass filter with passband cutoff frequency of 470 MHz, passband loss of less than 0.5 dB and stopband suppression of more than 30 dB is obtained.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713

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