激光大尺度3维动态聚焦扫描加工系统研究

发布时间：2018-02-12 07:54

本文关键词： 激光技术维动态聚焦光学设计维微加工　出处：《激光技术》2016年04期 　论文类型：期刊论文

【摘要】：为了满足激光3维微加工不断提高的精度要求、不断增大的加工尺寸范围,以及加工效率的上升需求,采用理论分析和计算结合的方法,研制出由动态聚焦镜和2维扫描振镜组合的动态聚焦系统,与高精度X-Y-Z 3维高精度工作台集成为一台激光大尺度3维动态聚焦扫描加工设备。设计了焦距为100mm、视场角±15°、光阑口径7mm、后工作距137mm、相对畸变小于0.5%的远心f-θ镜和入光口径8mm、光学杠杆比1∶8、后工作距800mm±40mm的动态聚焦镜系统,并使用ZEMAX软件对系统关键光学部件动态聚焦镜和远心f-θ镜进行光学设计及系统性能评价。结果表明,通过工艺控制软件分层拼接,实现了460mm×310mm×50mm大尺度3维动态聚焦的高精度紫外激光微加工功能,在该3维扫描范围内,激光聚焦光斑直径始终保持小于10μm,从而满足大尺度激光3维精密微加工需求。
[Abstract]:In order to meet the requirements of increasing accuracy, increasing machining size range and increasing machining efficiency, the method of combining theoretical analysis and calculation is adopted. A dynamic focusing system is developed, which is composed of a dynamic focusing mirror and a two-dimensional scanning vibroscope. A laser large scale 3D dynamic focusing scanning machine is integrated with a high precision X-Y-Z3 high precision worktable. A telecentric F- 胃 mirror with a focal length of 100mm, an angle of view 卤15 掳, an aperture of 7mm, a working distance of 137mm and a relative distortion of less than 0.5% is designed. A dynamic focusing mirror system with an optical aperture of 8 mm, an optical lever ratio of 1: 8, and a working distance of 800 mm 卤40 mm, The optical design and performance evaluation of dynamic focusing mirror and telecentric f- 胃 mirror, which are key optical components of the system, are carried out by using ZEMAX software. The high precision UV laser micromachining function of 460mm 脳 310mm 脳 50mm large scale 3D dynamic focusing is realized. In the range of 3D scanning, the diameter of laser focusing spot is always less than 10 渭 m, which meets the requirement of large scale laser 3D precision micromachining.
【作者单位】：华中科技大学武汉光电国家实验室;
【基金】：国家自然科学基金资助项目(51175205;51475182)
【分类号】：TN249

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