非共振型压电电机驱动的大行程精密定位旋转平台的建模和实验

发布时间：2018-02-12 13:18

  本文关键词： 大行程旋转平台 非共振压电电机 精密定位 光波导封装　出处：《光学精密工程》2016年11期 　论文类型：期刊论文

【摘要】：针对目前光波导封装使用的精密定位平台行程小,结构与控制系统复杂的问题,提出了非共振型压电电机驱动的大行程精密旋转定位平台。该平台通过压电电机的连续作动和步进作动两种工作模式来满足大行程和高精度要求。首先对该精密旋转定位平台进行动力学建模,确定了系统运动方程。然后,分析其作动机理,研究影响旋转平台转速的不同因素。最后,实验研究该精密旋转定位平台的速度、步距、分辨率与负载特性,确定平台连续作动与步进作动的驱动方式。实验结果表明,在直流偏置为60V,峰峰电压为120V,频率为180 Hz的正弦波电压激励下,该精密旋转定位平台最大转速可达47 963.2μrad/s,分辨率和最大负载分别为3μrad和60g。与现有的大行程精密定位旋转平台相比,设计的平台具有行程大,精度高,结构简单,稳定可控,且装配调试方便,易于批量化生产等优势。
[Abstract]:Aiming at the problems of small stroke and complex structure and control system of precision positioning platform used in optical waveguide packaging, A precision rotary positioning platform with large stroke driven by non-resonant piezoelectric motor is proposed. The platform can satisfy the requirements of long stroke and high precision through the continuous actuation and step actuation of the piezoelectric motor. Rotating positioning platform for dynamic modeling, The motion equation of the system is determined. Then, the motive theory is analyzed, and the different factors affecting the rotational speed of the rotating platform are studied. Finally, the speed, step distance, resolution and load characteristics of the precision rotary positioning platform are studied experimentally. The experimental results show that the DC bias is 60 V, the peak voltage is 120 V, and the frequency is 180 Hz. The maximum rotational speed of the precision rotary positioning platform can reach 47,963.2 渭 radr / s, the resolution and the maximum load are 3 渭 rad and 60 g respectively. Compared with the existing large-stroke precision positioning and rotating platform, the designed platform has the advantages of large stroke, high precision, simple structure, stable and controllable. And easy to assemble and debug, easy to batch production and other advantages.
【作者单位】： 南京航空航天大学机械结构力学及控制国家重点实验室;华侨大学精密测量技术及仪器研究中心;
【基金】：国家自然科学基金资助项目(No.51375224);国家自然科学基金重大研究计划资助项目(No.91223201);国家自然科学基金青年基金资助项目(No.51405420) 江苏省自然科学基金青年基金资助项目(No.BK20140474) 江苏高校优势学科建设工程资助项目
【分类号】：TN252
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本文编号：1505724