3自由度硅片台解耦时变参数在线递推估计

发布时间：2018-02-15 04:52

本文关键词： 线缆扰动解耦在线递推估计算法气浮平面电机广义质心　出处：《清华大学学报(自然科学版)》2016年02期 　论文类型：期刊论文

【摘要】：在光刻机硅片台高精度运动控制系统中,线缆对硅片台运动产生的扰动是一个主要的扰动源。这是由于线缆部件附加在硅片台上的扰动力和力偶导致了系统的耦合问题,恶化了系统运动控制的性能。该文通过对硅片台粗动台的力学建模,分析附加力偶的影响,引入广义质心偏移的数学描述,通过时变参数在线递推估计算法获得广义质心偏移的参数,该参数实时用于硅片台平面电机4组线圈水平推力的解耦。实验结果表明:使用该参数递推估计算法实现实时动态解耦,自适应能力强,降低了系统3自由度之间的串扰,提高了运动控制系统的性能。
[Abstract]:In the high-precision motion control system of silicon wafer of lithography machine, the disturbance caused by cable to the motion of silicon wafer is a main source of disturbance, which is due to the coupling problem caused by the disturbing force and couple of cable parts attached to the wafer. The performance of system motion control is deteriorated. Through the mechanical modeling of the coarse moving platform of the wafer platform, the effect of additional couple is analyzed, and the mathematical description of generalized centroid migration is introduced. The parameters of generalized centroid migration are obtained by on-line recursive estimation of time-varying parameters. This parameter is used to decouple the horizontal thrust of four sets of coil of planar motor on silicon chip in real time. The experimental results show that the recursive parameter estimation algorithm is used to realize the real-time dynamic decoupling, and the adaptive ability is strong, and the crosstalk between the three degrees of freedom of the system is reduced. The performance of motion control system is improved.
【作者单位】：清华大学摩擦学国家重点实验室;
【基金】：国家自然科学基金项目(51475261,51475262) 清华大学自主科研项目(20151080363)
【分类号】：TN305.7

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