一种近方脊滤波器的设计与快速制造（英文）

发布时间：2018-02-20 03:47

本文关键词： SU-微加工微波滤波器矩形波导 W波段　出处：《红外与毫米波学报》2017年01期 　论文类型：期刊论文

【摘要】：滤波器是信号传输系统中的重要组件.提出一种快速、高精度复制工艺方法,用于设计和制备WR-10波段矩形波导滤波器.采用多层匀胶单次紫外曝光工艺(硅片上匀SU-8胶),制备出的滤波器高度误差小于0.03%(3μm),陡直度误差小于1.1o.实验结果表明,用该方法制备毫米波滤波器技术可行,并取得了卓越的电磁性能(关于:插入损耗,回波损耗和带宽).最终测试结构可知,通带内的插入损耗测得结果小于0.5 dB,几乎可以忽略不计,在整个通带内回拨损耗大于10 dB.结果表明,这种快速制造技术是制备太赫兹射频器件的一种有效办法,这种新技术将成为推动太赫兹射频器件未来发展的主要动力.
[Abstract]:Filter is an important component of signal transmission system. It is used to design and fabricate the WR-10 band rectangular waveguide filter. The filter height error is less than 0.03 渭 m and the steepness error is less than 1.1 o. by using multilayer homogenized single ultraviolet exposure (SU-8 glue on silicon wafer), the error of the filter is less than 0.03 渭 m, the error of steepness is less than 1.1 o. the experimental results show that, It is feasible to fabricate millimeter wave filter by this method, and the excellent electromagnetic properties (about insertion loss, echo loss and bandwidth) are obtained. The result of insertion loss measurement in passband is less than 0.5 dB, which is almost negligible. The backdial loss is greater than 10 dB in the whole passband. The results show that this rapid manufacturing technique is an effective method for fabricating terahertz RF devices. This new technology will be the main driving force for the future development of terahertz RF devices.
【作者单位】：中北大学电子测试技术重点实验室;
【基金】：Supported by National Science Foundation of China(51475438) Research Project Supported by Shanxi Scholarship Council of china(2014-055) Graduate student education innovation project in Shanxi province(2016BY124)
【分类号】：TN713

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