电子轰击材料出气性能

发布时间：2018-02-23 22:41

本文关键词： 微波真空电子器件电子轰击材料出气放气速率电离规管　出处：《真空科学与技术学报》2017年04期 　论文类型：期刊论文

【摘要】：固体材料在大气中会溶解、吸附一些气体,当材料置于真空环境下,就会因气体解溶、解吸、电子轰击等而发生放气。电真空微波器件广泛应用于加速器、卫星通信、可控热核聚变、全球定位及未来军事前沿的高功率微波武器等方面,其制造过程中非常关键的步骤是真空获得。为提高微波电真空器件研制过程中的管内真空水平,本文研制了高精度真空材料放气测试装置。系统采用小孔流导法测试出气率,极限真空低于5.0×10~(-7)Pa。利用本装置进行了电子轰击材料出气的试验研究。实验表明无氧铜在脉冲电子束轰击下出气速率与电压、频率、脉宽成正比;电子轰击的材料暴露大气后,在电子束轰击下出气速率在短时间内迅速降低到以前的放气率水平。采用四级质谱仪对电子轰击时真空室内的残余气体成分进行了分析,其主要成分为H_2(2),其它成份依次为H_2O(18),N_2(28),和CO_2(44)。对电子轰击材料出气机理进行了分析。金属电离规管进行的电子轰击除气实验研究也证明了这些实验结果。因此利用热阴极或电子枪作为电子发射源,对微波电真空器件收集极、阳极等金属材料进行电子轰击除气,将是制造长寿命高可靠微波电真空器件所必要且可行的方法。
[Abstract]:The solid material dissolves in the atmosphere and adsorbs some gases. When the material is placed in a vacuum environment, the gas desorption, desorption, electron bombardment and so on will result in the release of gas. The electro vacuum microwave devices are widely used in accelerators, satellite communications, etc. In such aspects as controllable thermonuclear fusion, global positioning and future military frontier high-power microwave weapons, the key step in the manufacturing process is the acquisition of vacuum. In this paper, a high precision vacuum material degassing test device is developed. The system uses the small hole flow conductivity method to measure the gas output rate. The limit vacuum is less than 5.0 脳 10 ~ (10) ~ (-7) Pa. The experimental study on the exhalation of materials by electron bombardment has been carried out. The experimental results show that the gas output rate of oxygen free copper under pulsed electron beam bombardment is proportional to the voltage, frequency and pulse width, and the electron bombarded material is exposed to the atmosphere. The exhalation rate under electron beam bombardment decreased rapidly to the previous exhalation rate in a short time. The residual gas composition in the vacuum chamber during electron bombardment was analyzed by using a four-stage mass spectrometer. The main components are H2O 2G, and the other components are H _ S _ 2O _ (18) / N _ T _ (22) T _ (28) and CO ~ (2 +) _ (44). The mechanism of exhalation of electronic bombardment materials is analyzed. The experimental results of electron bombardment degassing by metal ionization regulation also prove these experimental results. A pole or an electron gun as an electron emitter, Electron bombardment of metal materials such as collector and anode of microwave vacuum devices will be a necessary and feasible method to manufacture long life and high reliability microwave vacuum devices.
【作者单位】：中国科学院电子学研究所;
【基金】：国家973项目(批准号2013 CB 328901)
【分类号】：TN104

【相似文献】