准分子激光控制和保护电路设计与研究

发布时间：2018-03-07 02:05

本文选题：准分子激光控制　切入点：保护系统　出处：《中国科学技术大学》2017年硕士论文　论文类型：学位论文

【摘要】：准分子激光是目前紫外波段脉冲能量最大的激光光源,在工业微加工、物理和材料科研,以及眼科、皮肤科医疗等领域有着许多独特的应用。而这些应用对准分子激光器的性能也提出了较高的要求,尤其是稳定的运行、简便的控制和可靠的保护。本文主要对放电激励准分子激光控制和保护系统进行了研究工作。文章介绍了准分子激光器基本结构,简述了激光器控制系统的各功能模块和抗干扰设计,控制系统实现了对激光器的有效可靠控制;其次,设计了高压放电系统的保护电路,优化了模拟量传输方案,实现了对整个激光器实时工作状态有效监测和闸流管触发异常保护控制,提高了系统的安全性和可靠性。最后重点研究了激光脉冲能量的无损检测和闭环控制方案,采用PIN管检测高反镜漏光并结合高速高精度积分电路,实现了响应快、精度高且无损的实时在线检测;结合闭环控制方案调节工作电压补偿激光脉冲能量的衰减,实现了稳定的激光脉冲能量输出。本文设计的系统包含模拟量检测、放电高压检测和保护、激光脉冲能量检测的多闭环控制。模拟量检测采用直接测量V-F变换的频率信号,减少了中间转化模块,达到响应时间～6ms,平均误差小于0.5%,实现强电磁干扰环境下的高精度模拟量传输和控制,满足精准工作气体配置和系统温度稳定的闭环控制需求。放电高压保护系统对电流及每个触发脉冲实时检测,响应时间～5us,实现了高压模块的闭环控制和有效的异常保护,提高了系统可靠性。激光脉冲能量检测系统在248nm及308nm准分子激光系统中进行了性能测试,电路响应时间～10us,满足kHz高重频的应用需求;与Ophir外置能量计对比测试,在统计分析结果上呈现良好的一致性;激光系统结合激光脉冲能量检测和放电高压控制,实现了有效的恒能量模式运行,能量均值和能量波动性都保持稳定,满足各类激光应用需求。
[Abstract]:Excimer lasers are currently the largest source of ultraviolet pulse energy in industrial microprocessing, physical and material research, and ophthalmology. There are many unique applications in the field of dermatology, such as medicine, and these applications have put forward higher requirements for the performance of molecular lasers, especially for stable operation. Simple control and reliable protection. In this paper, the control and protection system of discharge excited excimer laser is studied. The basic structure of excimer laser is introduced. The functional modules and anti-jamming design of the laser control system are briefly described. The control system realizes the effective and reliable control of the laser. Secondly, the protection circuit of the high-voltage discharge system is designed, and the analog transmission scheme is optimized. The effective monitoring of the whole laser's real-time working state and the control of the thyratron trigger abnormal protection are realized, and the security and reliability of the system are improved. Finally, the nondestructive detection of laser pulse energy and the closed-loop control scheme are studied emphatically. Using PIN tube to detect high mirror leakage and high speed and high precision integration circuit, the real-time on-line detection with fast response, high precision and nondestructive is realized, and the working voltage is adjusted to compensate for the attenuation of laser pulse energy in combination with the closed loop control scheme. The system designed in this paper includes analog signal detection, discharge high voltage detection and protection, laser pulse energy detection multi-closed loop control. The intermediate conversion module is reduced, the response time is less than 6 Ms, the average error is less than 0.5, and the high precision analog quantity transmission and control are realized under the environment of strong electromagnetic interference. The high voltage protection system detects the current and every trigger pulse in real time, and the response time is less than 5 us. the closed loop control and the effective abnormal protection of the high voltage module are realized. The laser pulse energy detection system has been tested in 248nm and 308nm excimer laser system, and the circuit response time is 10us. it meets the application requirement of kHz high repetition frequency, and compares with Ophir external energy meter. The results of statistical analysis show good consistency, the laser system combines laser pulse energy detection and discharge high voltage control to realize effective constant energy mode operation, the energy mean value and energy fluctuation remain stable. To meet the needs of various laser applications.
【学位授予单位】：中国科学技术大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN24

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