基于AFM系统的振动辅助加工实验研究

发布时间：2018-03-19 16:29

本文选题：原子力显微镜　切入点：AFM振动辅助加工　出处：《哈尔滨工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：原子力显微镜(AFM)已经成为加工微纳米沟槽的一种重要加工工具。目前可以利用AFM直接刻划进行沟槽的加工,但这种加工方式在提高微纳米沟槽的加工尺度,提高加工效率,增强加工得到沟槽形貌尺寸可控性方面仍有一定的难度。工作台和AFM相结合的刻划方式也仅仅提高了加工尺度,而基于振动的AFM机械刻划这一加工方式不仅提高了加工尺度,还提高了加工效率,增强了加工得到沟槽尺寸的可控性,在一定程度上减小了探针的磨损。本文对基于振动的AFM机械刻划这一加工方式进行进一步研究,在其基础上设计一种名为AFM振动辅助加工的加工方法。这种加工方法使探针水平面内没有运动,利用振动平台和定位平台提供样品在水平面内的圆周运动和匀速直线进给运动,其中振动平台用来提供样品水平面内一定频率和幅值的圆周运动,定位平台用来提供样品水平面内的进给运动,该加工方法类似于传统的铣削。本文对该加工方法加工过程,各加工参数对加工结果的影响,以及加工过程中探针磨损进行研究,主要包括以下几个方面:首先,搭建了AFM振动辅助加工系统,分析了加工系统中振动平台和定位平台的运动特性。研究了该加工方式的加工机理,并分析了控制系统参数对加工得到沟槽形貌的影响。然后,通过实验研究和理论分析的方法具体研究了振动平台圆周运动频率、振动平台圆周运动幅值、定位平台进给速度、定位平台进给方向和AFM在样品表面施加的垂直荷载这五个工艺参数对加工得到沟槽形貌特征的影响。最后,分析了探针不同磨损状态的探针对加工得到沟槽形貌的影响,研究了加工过程中探针的磨损状态,并分析了不同作用力对探针磨损的影响。
[Abstract]:AFM (atomic force microscope) has become an important tool for machining micro and nano grooves. At present, AFM can be used to directly depict grooves, but this kind of machining method can improve the machining scale and efficiency of micro and nano grooves. It is still difficult to obtain the controllability of groove shape and size in enhanced machining. The combination of worktable and AFM can only improve the machining scale, but the vibration-based AFM mechanical characterization not only improves the machining scale, but also improves the machining scale. The machining efficiency is also improved, the controllability of groove size is enhanced, and the wear of probe is reduced to a certain extent. In this paper, the machining method of AFM mechanical scribing based on vibration is further studied. On the basis of this method, a machining method called AFM vibration assisted machining is designed, which makes the probe horizontal plane without movement, and provides the circular motion of the sample in the horizontal plane and the uniform velocity linear feed motion by using the vibration platform and the positioning platform. The vibration platform is used to provide the circular motion of a certain frequency and amplitude in the horizontal plane of the sample, and the positioning platform is used to provide the feed motion in the horizontal plane of the sample, which is similar to the traditional milling method. The effects of machining parameters on machining results and probe wear during machining are studied, including the following aspects: firstly, a AFM vibration aided machining system is built. The motion characteristics of vibration platform and positioning platform in machining system are analyzed. The machining mechanism of the machining method is studied, and the influence of control system parameters on the groove morphology is analyzed. The frequency of circular motion of vibration platform, the amplitude of circular motion of vibration platform, the feed velocity of positioning platform are studied by means of experimental research and theoretical analysis. The influence of the feeding direction of the positioning platform and the vertical load imposed by AFM on the surface of the sample is analyzed. Finally, the influence of the probe with different wear states on the grooves morphology is analyzed. The wear state of the probe during machining was studied, and the influence of different forces on the wear of the probe was analyzed.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN05

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