基于氮化镓的导模共振滤波器分析研究

发布时间：2018-03-22 16:29

本文选题：导模共振　切入点：氮化镓　出处：《南京邮电大学》2015年硕士论文　论文类型：学位论文

【摘要】：导模共振滤波器因其结构简单、尺寸小易集成,且展现出窄带,高衍射效率的滤波效果,近年来引起了人们的广泛关注。而伴随着半导体材料和微机械技术的发展,利用导模共振效应设计基于第三代半导体材料代表氮化镓的可调谐光滤波器,对于促进光通信及相关光学领域的发展变的十分必要。本论文根据等效介质理论和严格耦合波理论,计算推导了导模共振腔产生共振现象的共振条件。然后以氮化镓亚波长光栅为研究对象,对反射型导模共振滤波器的理论设计和其光学特性进行了研究。首先,详细分析了在满足衍射波与传导模相位匹配条件下,所设计的强调制、弱调制、覆盖型、浮雕型以及三层波导型光栅结构对共振波长光谱性质的影响。研究表明:对于高空间频率波导光栅,调制系数影响耦合强度,并对光谱反射响应的衍射效率高低、带宽宽窄具有调控作用;光栅与薄膜波导的厚度、位置和数量能够对共振峰旁带起到不同程度的抑制作用。此外,还探讨了入射模式、光栅厚度和占空比对导模共振反射滤波的影响。最后,通过对等效模型的工作波长随光栅周期和入射光角度的变化规律的分析,设计了两种氮化镓亚波长光栅与静电致动器集成的可调谐光滤波器结构。一种是利用梳状致动器与单层强调制氮化镓光栅集成,通过施加致动电压拉神光栅周期,实现与光栅周期相匹配的共振波长位置在552nm-568nm范围的光栅周期可调滤波器,其线宽都在3nm以下。另一种利用平板电容致动器与带抗反射层的浮雕型光栅集成,通过施加致动电压控制入射角角度,实现共振滤波范围覆盖光通信C波段(1530nm-1565nm),且半峰宽满足密集波分复用系统100GHz信道要求的角度可调滤波器。为新型滤波器的设计提供了数据支持。
[Abstract]:The guided mode resonance filter has attracted much attention in recent years because of its simple structure, small size, easy integration, narrow band, high diffraction efficiency, and the development of semiconductor materials and micromachined technology. A tunable optical filter based on the third generation semiconductor material representing gallium nitride is designed by using the guided mode resonance effect. It is necessary to promote the development of optical communication and related optics. The resonance conditions of the resonant phenomenon in the guided mode resonator are calculated and deduced. Then the theoretical design and optical properties of the reflective guided mode resonance filter are studied with the Gallium nitride subwavelength grating as the research object. The emphasis system, weak modulation and cover type are analyzed in detail under the condition that diffraction wave and conduction mode phase match are satisfied. The effect of the structure of relief and three layer waveguide gratings on the spectral properties of resonance wavelength is studied. It is shown that for high spatial frequency waveguide gratings, the modulation coefficient affects the coupling strength and the diffraction efficiency of the spectral reflection response is high or low. The thickness, position and quantity of grating and thin film waveguide can restrain the side band of resonance peak to some extent. In addition, the incident mode is discussed. The effect of grating thickness and duty cycle on the guided mode resonance reflection filtering is analyzed. Finally, the variation of the equivalent model wavelength with the grating period and the incident light angle is analyzed. In this paper, two tunable optical filter structures for the integration of gallium nitride subwavelength grating and electrostatic actuator are designed. A grating periodic tunable filter with a resonant wavelength position matching the grating period is realized in the range of 552nm-568nm, the linewidth of which is below 3nm. Another type of grating is integrated with an embossed grating with an anti-reflection layer by using a flat plate capacitive actuator. By applying the actuation voltage to control the angle of incidence, The resonant filtering range covers the C band 1530nm-1565nmM of optical communication, and the half-peak width meets the requirements of the 100GHz channel in dense wavelength division multiplexing (DWDM) system, which provides the data support for the design of the new filter.
【学位授予单位】：南京邮电大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713

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