飞秒激光修复离子注入导致玻璃材料缺陷的实验研究

发布时间：2018-03-26 11:40

本文选题：飞秒激光　切入点：玻璃材料缺陷修复　出处：《北京理工大学》2015年硕士论文

【摘要】：离子注入具有参数高度可控的特点,被广泛应用于光学材料掺杂改性,在制造非线性光学元器件,如光波导,光开关等有独特优势。金属离子注入玻璃材料是其中常见应用,加工中会在玻璃材料约几百纳米深度内产生纳米粒子,这些纳米粒子在光场激发下会产生等离子体共振效应,从而形成特定的光学效应。但是离子注入过程中,由于高速离子对目标材料的撞击作用,会不可避免地产生结构缺陷,这将影响材料的光,电学以及机械性能,在很多应用中,需要材料中的结构均一完整,此时结构缺陷需要被修复。传统的加热退火及纳秒修复存在装置复杂且不具有选择性修复能力的问题,为此我们基于飞秒激光超短脉冲与超高能量密度特点产生的非线性吸收效应,提出利用飞秒激光修复玻璃材料中缺陷的新型加工方法。本文主要包含以下工作:(1)利用SRIM(Stopping and Range of Ions in Matter)软件模拟离子注入过程,包括:a)注入离子和缺陷在材料中的2维分布图像;b)注入离子导致反冲原子的分布情况;c)注入离子能量在材料中的分配。计算结果揭示了离子注入引发的缺陷类型和特征。(2)搭建飞秒激光修复样品缺陷的实验平台。光源为脉宽35fs,中心波长800nm的飞秒激光器。光路中使用多种光电学元器件实现能量的精确控制。样品固定在三维位移台上。位移台可以实现高空间分辨率的运动。对位移台进行了二次编程以满足特定实验要求。(3)进行飞秒激光修复样品缺陷实验。通过一系列表征手段分析了材料的光学性质和衬底结构以及表面形貌,包括通过紫外-可见光分光光度计测量了光吸收谱,通过拉曼共聚焦显微镜测量衬底网络特征,利用原子力显微镜测量材料表面形貌。我们通过一系列实验,显示当能量控制在合适范围内,衬底原子可以得到合适能量,回到原位修复缺陷,且不发生烧蚀。该新方法中,材料不发生熔融和烧蚀过程,也无需激光与离子束共同照射,具有高空间分辨,高效性和便利性,在非线性光学元器件的制造中有良好的应用前景。
[Abstract]:Ion implantation has been widely used in doping and modification of optical materials, and has unique advantages in making nonlinear optical components, such as optical waveguides, optical switches, etc. Metal ion implantation glass material is one of the common applications. Nanocrystalline particles are produced in glass at a depth of about hundreds of nanometers, which produce plasmon resonance effects under light field excitation, resulting in specific optical effects. But during ion implantation, Due to the impact of high velocity ions on the target material, structural defects will inevitably occur, which will affect the optical, electrical and mechanical properties of the material. In many applications, the structure of the material needs to be uniform and complete. Traditional heating annealing and nanosecond repair have complex devices and do not have selective repair capability. Therefore, we based on the nonlinear absorption effect of femtosecond laser ultrashort pulse and ultra-high energy density. A new processing method for repairing defects in glass material by femtosecond laser is proposed. This paper mainly includes the following work: 1) simulating the process of ion implantation by using SRIM(Stopping and Range of Ions in matter software. The distribution of recoil atoms caused by ion implantation in the material. The distribution of ion energy in the material. The calculated results reveal the type of defect initiated by ion implantation. Femtosecond laser is used to repair defects in samples. The light source is a femtosecond laser with a pulse width of 35fs and a center wavelength of 800nm. In the optical path, a variety of optoelectronic components are used to accurately control the energy. The sample is fixed in three dimensions. Displacement table. Displacement table can realize motion with high spatial resolution. Second programming of displacement table is carried out to meet specific experimental requirements. Femtosecond laser repair experiment of sample defects is carried out. A series of characterization methods are used to analyze the results. The optical properties, substrate structure and surface morphology of the material, This includes measuring the absorption spectrum by UV-Vis spectrophotometer, measuring the substrate network characteristics by Raman confocal microscopy, and measuring the surface morphology of the material by atomic force microscope. It is shown that when the energy is controlled within a suitable range, the substrate atom can obtain the appropriate energy and return to the in-situ repair of defects without ablation. In this new method, the material does not undergo melting and ablation, and there is no need for laser and ion beam irradiation. With high spatial resolution, high efficiency and convenience, it has a good application prospect in the manufacture of nonlinear optical components.
【学位授予单位】：北京理工大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TQ171.65;TN249

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