硅基模式转换器件的研究

发布时间：2018-03-31 08:11

本文选题：硅基光子集成　切入点：模式转换器件　出处：《上海交通大学》2015年硕士论文

【摘要】：近年来,随着人们对于通信网络数据传输容量和带宽的需求不断提升,传统的集成电路技术已经愈发不能满足人们的需求,而全光通信则避免了光电转换过程中产生的误码、噪声和功耗等问题,可以大幅度提高传输容量和带宽,得到了迅速的发展。硅基光子技术由于材料本身高折射率差、加工工艺与CMOS兼容等优势,便于低成本的超大规模集成光路的批量生产,成为光子学集成领域人们关注的焦点。在各种硅基光器件中,用于实现模式转换的器件由于其能够大大增加波导中传输信息的容量而得到了广泛研究。具体而言,分为高阶模式转换和偏振模式转换两类。其中高阶模式转换可以实现普通光学延迟线延迟量的倍增,从而增大波导的数据缓存能力;而偏振模式转换则解决了硅基器件偏振敏感性的问题。基于此,本文通过理论分析、仿真优化和实验实现了几种新型结构,具体而言分为以下三个部分:(1)针对高阶模式转换器件,通过设计不同参数的非对称锯齿结构变迹光栅,实现了TE0到TE1和TE1到TE2的高阶模式转换,将二者结合在一个延迟结构中,通过多次反向模式转换,将普通光学延迟线的延迟量提高三倍以上,并以此为基础提出了实现更大倍数延迟量的设想。(2)针对基于模式演变的偏振旋转器件进行研究,优化设计出一种前后波导厚度一致且无尖角的新型偏振旋转器,提高了其可集成性和可加工性,并充分发挥其大带宽、高容差的特性,有效实现了偏振模式转换。(3)针对基于模式混合的偏振旋转器件进行研究,通过仿真,实现了一种双阶梯形不对称截面的偏振旋转器,该器件具备高偏振消光比、低损耗、小尺寸等优点,并通过实验证明了其良好的偏振转换特性,在纯硅基集成领域实现了同类器件最高的偏振转换效率。
[Abstract]:In recent years, with the increasing demand for data transmission capacity and bandwidth of communication network, the traditional integrated circuit technology has become increasingly unable to meet the needs of people, and all-optical communication has avoided the error code generated in the process of photoelectric conversion. Problems such as noise and power consumption can greatly improve the transmission capacity and bandwidth, and have been developed rapidly. Due to the high refractive index of materials, the fabrication process is compatible with CMOS, and so on. The mass production of large scale integrated optical path with low cost has become the focus of attention in the field of photonics integration. Devices used to achieve mode conversion have been extensively studied for their ability to greatly increase the capacity of information transmitted in waveguides. It can be divided into two categories: high order mode conversion and polarization mode conversion. High order mode conversion can double the delay of ordinary optical delay line and increase the data buffer ability of waveguide. Polarization mode conversion solves the problem of polarization sensitivity of silicon based devices. Based on this, several new structures are realized by theoretical analysis, simulation, optimization and experiment. Specifically, it is divided into the following three parts: 1) for high-order mode conversion devices, the high-order mode conversion from TE0 to TE1 and from TE1 to TE2 is realized by designing asymmetric zigzag structure apodized gratings with different parameters, and the two are combined in a delay structure. The delay of ordinary optical delay line is increased by more than three times through multiple reverse mode conversion, and based on this, the assumption of realizing a greater multiple delay is put forward. (2) the polarization rotation device based on mode evolution is studied. A new polarization rotator with uniform thickness of front and rear waveguides and no sharp angle is designed, which improves its integrability and machinability, and gives full play to its characteristics of large bandwidth and high tolerance. The polarization mode conversion is realized effectively. (3) the polarization rotation device based on mode mixing is studied. Through simulation, a kind of polarization rotator with double step asymmetric section is realized. The device has high polarization extinction ratio and low loss. The advantages of small size and good polarization conversion characteristics are proved by experiments. The highest polarization conversion efficiency of the same kind of devices is realized in the field of pure silicon based integration.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN256

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