压电陶瓷两维偏摆镜驱动系统的设计

发布时间：2018-04-02 07:35

本文选题：压电陶瓷　切入点：两维偏摆镜　出处：《中国科学院研究生院(长春光学精密机械与物理研究所)》2015年硕士论文

【摘要】：光束合成设备中,为每台激光器配备了相应的压电陶瓷两维偏摆镜来补偿激光的光路偏移。项目中偏摆镜在两个方向的摆角行程范围都要不小于±1mrad,偏摆镜的整行程重复定位精度要优于20μrad。因此,需要设计压电陶瓷两维偏摆镜的驱动系统,实现高精度的定位要求。本设计首先建立了压电陶瓷两维偏摆镜驱动系统硬件的总体框架,论述了各个模块的设计原理,包括控制模块、驱动电源模块、检测回路模块。控制模块主要讨论了DSP芯片和FPGA芯片选择及其外围电路设计、D/A转换电路和A/D转换电路设计;驱动电源模块包括原理及需求分析、器件的选择、电路的设计等;检测回路模块主要论述了放大电路的工作原理和电路设计。接着对所设计的硬件电路的性能进行了测试,实验表明该硬件电路的各项指标都能满足要求。然后,在压电陶瓷迟滞特性的基础上,建立了改进非对称PI迟滞模型,解决了迟滞曲线非对称的问题,使得拟合精度提高了。基于改进非对称PI迟滞模型,采用二分法设计了前馈控制算法,补偿掉压电陶瓷的迟滞特性导致的非线性。然后进行PID反馈控制算法的设计,将前馈控制与反馈控制结合得到了复合控制算法,使得跟踪精度达到了16.2μrad。本文重点关注了小角度偏转条件下驱动方式的选择问题以及怎样提高控制精度问题。理论研究和实验表明,这项研究工作提高了压电陶瓷的性能,对压电陶瓷两维偏摆镜在光束合成设备中的应用具有重要的理论意义和实际价值。
[Abstract]:In beam synthesis equipment, Each laser is equipped with the corresponding piezoelectric ceramic two dimensional pendulum mirror to compensate the optical path offset. The range of swing angle stroke of the pendulum mirror in both directions is not less than 卤1mrad. the precision of the whole stroke repeat positioning of the pendulum mirror is better than 20 渭 rad. therefore, It is necessary to design the driving system of the piezoelectric ceramic two-dimensional pendulum mirror to achieve the high precision positioning requirements. Firstly, the overall hardware frame of the piezoelectric ceramic two-dimensional pendulum mirror driving system is established, and the design principle of each module is discussed. The control module mainly discusses the selection of DSP chip and FPGA chip and the peripheral circuit design of D / A conversion circuit and A / D conversion circuit, the driving power module includes the principle and requirement analysis, the control module includes the control module, the driving power supply module, the control module, the control module, the DSP chip and the FPGA chip selection and the peripheral circuit design. The circuit module mainly discusses the working principle and circuit design of the amplifier circuit. Then the performance of the designed hardware circuit is tested. Experiments show that all the parameters of the circuit can meet the requirements. Then, based on the hysteresis characteristics of piezoelectric ceramics, an improved asymmetric Pi hysteresis model is established to solve the problem of asymmetric hysteresis curve. Based on the improved asymmetric Pi hysteresis model, the feedforward control algorithm is designed by using dichotomy to compensate for the nonlinearity caused by hysteresis of piezoelectric ceramics. Then the PID feedback control algorithm is designed. The compound control algorithm is obtained by combining feedforward control with feedback control. The tracking accuracy reaches 16.2 渭 rad. this paper focuses on the choice of driving mode and how to improve the control precision under the condition of small angle deflection. The theoretical and experimental results show that the research work improves the performance of piezoelectric ceramics. It has important theoretical significance and practical value for the application of piezoelectric ceramic two dimensional pendulum mirror in beam synthesis equipment.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN24;TM282

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