基于线算法的BOSCH工艺三维模型与模拟

发布时间：2018-04-09 03:03

本文选题：MEMS　切入点：MEMS加工工艺　出处：《合肥工业大学》2015年硕士论文

【摘要】：MEMS(即微机电系统)在集成电路技术基础上发展而来,经过二十多年来的飞速发展,已发展成为一门涉及到电学、热学、机械、磁等不同学科领域的交叉学科,广泛应用于材料科学、生物医学、航空航天和汽车工业等各重要领域,一直都是世界各国科学技术研究的热点。MEMS加工技术是MEMS器件研究和制造的基础,主要包括刻蚀、淀积、光刻电铸成型(LIGA)等多种加工工艺。MEMS加工工艺相比于IC工艺而言,更加注重MEMS器件在微纳尺度下的三维立体结构和表面形貌。目前,除了利用部分集成电路的工艺标准,针对很多MEMS工艺的研究探索主要还是依赖积累的经验和反复的试探,这不可避免的导致了生产资源的浪费、生产周期的延长,造成了成本增加,也不利于MEMS的进一步发展。在MEMS工艺计算机模拟领域中,对于二维的模拟,已有一些研究。而MEMS工艺的三维模拟,面临着CPU和内存占用大、算法不完善、模拟速度慢以及模拟精度低等问题。随着MEMS器件的功能越来越细化,其结构的设计和加工也越来越复杂,高深宽比结构的刻蚀作为MEMS工艺的关键性工艺引起了广泛的关注。在MEMS工艺中,通常采用BOSCH工艺来实现高深宽比结构。目前,对于MEMS工艺模拟技术中单一加工工艺已有一些研究,但对于BOSCH工艺这种复合工艺的三维建模模拟仿真未见报道。本文提到的一些商业软件虽对简单的单项工艺有所涉及,但所提供的文档大部分是对软件的使用方法进行介绍,对工艺建模方法及仿真过程非常保密,很少介绍和叙述。论文首先对现有几种仿真平台做了简要介绍和对比；接着,深入研究几种三维表面演化算法,论证其优缺点及可行性,优化改进三维线算法模型,并基于此算法对BOSCH工艺进行三维建模,运用C语言编写程序处理数据来对演化过程进行模拟,用MATLAB将演化的数据结果进行图形化输出,从而达到三维可视化的结果。在BOSCH工艺中,刻蚀窗口的形状、尺寸和加工时长,均对加工结果的深宽比和侧壁表面形貌产生影响。本文结合实验情况,通过改变初始条件、控制模拟时间周期,得到不同刻蚀窗口条件下的模拟结果,最后对模拟结果进行分析,与实验及预测结果较为一致,验证了本算法及物理模型的准确性,为MEMS CAD领域中的刻蚀工艺进一步的研究(如实时模拟等)提供研究基础。
[Abstract]:Based on the integrated circuit technology, MEMS (Micro-Electromechanical system) has developed into an interdisciplinary subject involving electrical, thermal, mechanical, magnetic and other disciplines after more than 20 years of rapid development.Widely used in material science, biomedicine, aerospace, automobile industry and other important fields, it has been a hot spot in science and technology research all over the world. MEMS processing technology is the basis of the research and manufacture of MEMS devices, including etching, deposition, and so on.Compared with IC process, many kinds of fabrication processes, such as photolithographic electroforming process, pay more attention to the three-dimensional structure and surface morphology of MEMS devices at micro and nano scale.At present, in addition to using the process standards of some integrated circuits, the research and exploration of many MEMS processes mainly rely on accumulated experience and repeated explorations, which inevitably lead to the waste of production resources and the prolongation of production cycle.Has caused the cost to increase, also unfavorable to the MEMS further development.In the field of computer simulation of MEMS process, two-dimensional simulation has been studied.The 3D simulation of MEMS process is faced with many problems, such as large CPU and memory occupation, imperfect algorithm, slow simulation speed and low simulation precision.As the functions of MEMS devices become more and more refined, the design and fabrication of their structures are becoming more and more complicated. The etching of high aspect ratio structures has attracted wide attention as the key technology of MEMS process.In MEMS process, BOSCH process is usually used to realize high aspect ratio structure.At present, there has been some research on the single machining process in the MEMS process simulation technology, but there is no report on the 3D modeling simulation of the BOSCH process.Although some commercial software mentioned in this paper are related to a simple single process, most of the documents provided are about the use of the software. The process modeling method and the simulation process are very confidential and rarely introduced and described.Firstly, several simulation platforms are briefly introduced and compared. Then, several 3D surface evolution algorithms are deeply studied, their advantages, disadvantages and feasibility are demonstrated, and the improved 3D line algorithm model is optimized.Based on this algorithm, 3D modeling of BOSCH process is carried out. C language is used to process data to simulate the evolution process. The result of evolution is graphically output by MATLAB, and the result of 3D visualization is achieved.In BOSCH process, the shape, size and processing time of the etching window have an effect on the aspect ratio of the machining results and the surface morphology of the side wall.In this paper, the simulation results under different etching windows are obtained by changing the initial conditions and controlling the simulation time periods. Finally, the simulation results are analyzed, which are consistent with the experimental and prediction results.The accuracy of the algorithm and the physical model is verified, which provides the basis for the further study of etching technology in the field of MEMS CAD, such as real-time simulation.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405

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