液滴喷射靶的检测和分析系统

发布时间：2018-04-14 14:07

本文选题：极紫外光刻 + 液滴喷射靶　；参考：《华中科技大学》2015年硕士论文

【摘要】：为了制造出集成度更高的芯片,下一代光刻技术要求更短波长的极紫外(EUV)光源,激光等离子体(LPP)技术目前被认为是最可能的选择。在研究和制备激光等离子体极紫外光源时,得到良好的锡液滴靶是其中重要的一步。锡液滴靶是通过振动对射流进行扰动,使锡流连续均匀断裂得到的。本论文实验目的在于利用水作为靶材模拟锡液滴喷射的产生、控制和检测,检验出整个喷射靶发生器和检测分析系统的实际可行性,从而为将来产生实用的锡液滴靶打下基础。本论文的主要研究了一套用于激光等离子体极紫外光源的液滴喷射靶发生器和液滴检测分析系统。液滴喷射靶发生装置稳定可靠,操作方便,喷射出的液滴能够均匀稳定断裂。利用Lab VIEW软件调用和控制CCD摄像头,通过调用动态链接库使CCD完成液滴图像的采集和显示,实时监测液滴的运动情况,再完成图像的批量存储。保存的液滴图像将由MATLAB软件进行分析计算,得到液滴尺寸、位置、间距等参数,可以定量地评估液滴喷射的质量和稳定性。实验比较了几种类型喷嘴的喷射水液滴效果,并采用金属拉丝模喷嘴在不同条件下喷射出重复频率30 kHz的水液滴靶材,CCD摄像头以5 Hz频率采集液滴图像。经分析批量存储的图像得到了液滴尺寸、间距和水平方向位置等信息,并且得到了各项参数在不同条件下的变化趋势。尺寸、间距较小,证明水液滴靶喷射稳定且均匀;但水平方向位置有一定偏差,表明液滴喷射存在一定的左右摆动。
[Abstract]:In order to produce a more integrated chip, the next generation lithography technology requires a shorter wavelength of the very ultraviolet (VUV) EUV light source. Laser plasma / LPP (laser plasma) technology is considered to be the most likely choice at present.It is an important step to obtain a good tin droplet target in the study and preparation of laser plasma extreme ultraviolet light source.The tin droplet target is obtained by the vibration disturbance of the jet and the continuous uniform fracture of the tin flow.The purpose of this paper is to use water as a target to simulate the generation, control and detection of droplet injection, and to verify the feasibility of the whole jet target generator and the detection and analysis system, thus laying the foundation for the future production of practical tin droplet targets.In this paper, a droplet jet target generator and a droplet detection and analysis system for laser plasma extreme ultraviolet light source are studied.The droplet injection target generating device is stable and reliable, easy to operate, and the droplet can break evenly and stably.The Lab VIEW software is used to call and control the CCD camera. By calling the dynamic link library, the CCD can complete the collection and display of the droplet image, monitor the droplet motion in real time, and then finish the batch storage of the image.The saved droplet image will be analyzed and calculated by MATLAB software, and the parameters of droplet size, position and spacing can be obtained, which can quantitatively evaluate the quality and stability of droplet injection.The effects of spray droplets of several kinds of nozzles were compared experimentally, and the droplet images were collected at 5 Hz by using metal wire drawing die nozzles to spray water droplet targets with a repetition rate of 30 kHz under different conditions.The size, spacing and horizontal position of the droplet are obtained by analyzing the images stored in batches, and the variation trend of the parameters under different conditions is obtained.It is proved that the injection of water droplet target is stable and uniform, but there is a certain deviation in the horizontal direction, which indicates that the droplet jet has a certain swing from left to right.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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