GeSbSe基质光子晶体波导传输特性与制备研究

发布时间：2018-04-14 20:08

本文选题：光子晶体波导 + 传输特性　；参考：《宁波大学》2015年硕士论文

【摘要】：Ge Sb Se硫系光子晶体波导结合了硫系材料和光子晶体带隙的特征。由于硫系材料具有较高的折射率、较低的双光子吸收、良好的三阶非线性和中红外透过性等优点,使硫系光子晶体波导广泛应用在非线性光学和红外传感领域。本文从理论上研究了硫系光子晶体弯曲波导的传输特性,并对硫系直波导的制备做了简单研究。本文从硫系光子晶体的结构设计开始着手,分别设计了通信波段和中红外波段硫系光子晶体波导结构;接着对通信波段和中红外波段硫系60°弯曲波导传输特性进行了研究,使这两种波段的波导在很长工作波长范围内都有很高的传输效率,在此基础上并对连续60°弯曲中红外波段波导进行简单结构优化;最后对硫系光子晶体直波导的制备做了简单的介绍,分别利用电子束曝光加ICP刻蚀和聚焦离子束这两种方法来刻蚀硫系光子晶体直波导,并对制备出的直波导结构参数做了简单分析。第一章首先介绍了光子晶体的概念及其特性和应用范围,接着介绍了硫系玻璃的特征及优点,并对硫系光子晶体波导研究现状做了简单介绍,最后对本文的研究背景做了简单说明。第二章介绍光子晶体相关的理论知识。详细介绍了用于计算光子晶体带隙的平面波展开法(PWE)和用于模拟传输特性的时域有限差分法(FDTD),并对这两种方法公式做了简单的推导。第三章从光学软件RSoft的基本操作入手,分别设计了通信波段和中红外波段硫系光子晶体波导结构,设计时主要分析了硫系光子晶体结构类型、晶格类型、半径等对硫系光子晶体带隙的影响,最终得到了宽带隙的硫系光子晶体,当在设计好的硫系光子晶体中引入线缺陷时,可以得到性能优良的硫系光子晶体波导。第四章重点介绍了硫系光子晶体60°弯曲波导在通信波段和中红外波段传输特性的优化,对于通信波段弯曲波导,未优化的波导在通信波段的传输效率很低,通过在弯曲区域加上若干空气孔使其尽量缓平,可以大大提高其传输效率。同理对于中红外波段弯曲波导,未优化的波导传输效率也很低。可以首先在弯曲区域引入两个空气孔使其尽量缓平,再在线缺陷区域引入若干空气孔,经过上述两步优化的中红外波段硫系光子晶体波导无论是传输带宽还是传输效率都能得到很大的提高,为集成光学的实现提供了可能。第五章介绍了硫系光子晶体直波导的制备工艺,重点介绍电子束曝光和聚焦离子束刻蚀来制备硫系光子晶体直波导,最后对制备所得波导结构做了简单的性能分析,并比较了这两种制备方法的优缺点。第六章对全文的总结,并指出本论文不足之处。
[Abstract]:Ge Sb Se chalcogenide photonic crystal waveguide materials and combines with the characteristics of photonic crystal band gap chalcogenide. Because of the refraction chalcogenide material has high rate, low two-photon absorption, three order nonlinear and good in infrared transmission advantages, make chalcogenide photonic crystal waveguide is widely used in nonlinear optics and infrared the sensing field. This paper studies the transmission properties of chalcogenide photonic crystal waveguide theoretically, and the sulfur straight waveguide preparation to do a simple research. This article starts from the structure design of chalcogenide photonic crystal, respectively designs the communication band and red band chalcogenide photonic crystal waveguide structure; then study on the transmission characteristics of communication band and infrared chalcogenide 60 degree bend waveguide, the waveguide of the two band has high transmission efficiency in the long wavelength range, on the basis of continuous 60 degree bend Song in the infrared band waveguide has the advantages of simple structure optimization; at the end of the straight waveguide chalcogenide photonic crystals is briefly introduced, respectively by electron beam lithography and ICP etching and focused ion beam etching method to the two kinds of chalcogenide photonic crystal waveguide, the straight waveguide structure parameters and the prepared to do a simple analysis. The first chapter introduces the concept of photonic crystals and its characteristics and application scope, and then introduces the characteristics and advantages of chalcogenide glass, and the research status of chalcogenide photonic crystal waveguide is introduced, finally the background of this study made a simple description. The second chapter introduces the related theoretical knowledge of photonic crystal details of the calculation for planar photonic band gap wave expansion method (PWE) and used to simulate the transmission characteristics of the finite-difference time-domain method (FDTD), and the two methods to do a simple formula is derived. The third chapter Starting from the basic operation of the optical software RSoft, designs communication band and infrared band chalcogenide photonic crystal waveguide structure design, mainly analyzes the chalcogenide photonic crystal structure, lattice type, the radius of influence on chalcogenide photonic crystal band gap, finally got the chalcogenide photonic crystal band gap, when the line defect in chalcogenide photonic crystal in good design, can get the chalcogenide photonic crystal waveguide with excellent performance. The fourth chapter focuses on the optimization of chalcogenide photonic crystal 60 degree bend waveguide in communication band and infrared transmission characteristics, the communication band bend waveguide, waveguide non optimized transmission efficiency in communication the band is very low, through the curved region plus several air holes to minimize corrosion, can greatly improve the transmission efficiency. Empathy for the mid infrared band bend waveguide, wave guide transmission efficiency is not optimized The rate is very low. It first introduces two air holes in the curved region to minimize corrosion, then the defect area online introduces a number of air holes, through infrared chalcogenide photonic crystal waveguide of the two step optimization of both the transmission bandwidth or transmission efficiency can be greatly improved, provides the possibility to realize integration optics. The fifth chapter introduces the preparation technology of straight waveguide chalcogenide photonic crystal, focuses on electron beam lithography and focused ion beam etching to prepare chalcogenide photonic crystal waveguide, finally makes a simple analysis to the preparation of the waveguide structure, and compared the advantages and disadvantages of the two kinds of preparation methods. In the sixth chapter, the summary of the whole thesis, and points out the deficiency of this paper.

【学位授予单位】：宁波大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN252

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