248nm准分子激光刻蚀钠钙玻璃微通道低裂损工艺研究

发布时间：2018-04-25 21:50

本文选题：准分子激光微加工 + 玻璃表面刻蚀　；参考：《应用激光》2017年04期

【摘要】：248nm准分子激光直接刻蚀钠钙玻璃微通道来制作生物芯片具有较大优势和潜力,但目前存在易发生碎裂、微通道底面处粗糙度高等问题。采用248nm准分子激光束以静态刻蚀及扫描直写刻蚀两种方式刻蚀钠钙玻璃来对低裂损工艺进行研究。首先通过实验研究了激光加工玻璃的工艺参数与玻璃微通道的刻蚀质量之间的关系,然后分析了248nm准分子激光刻蚀钠钙玻璃的裂损刻蚀机理,最后通过变换工艺参数来设计新的加工工艺流程以改善加工质量。实验结果表明,随着刻蚀处激光能量密度的增加,玻璃微通道的边缘裂损程度增大,并且刻蚀表面粗糙度增大,刻蚀质量下降;另外发现激光刻蚀后的粗糙表面可以增加玻璃材料对入射激光能量的吸收率,从而降低了激光刻蚀玻璃材料的阈值,较低的激光能量密度可降低刻蚀面的粗糙度。最后工艺流程改进实验,所加工的微通道质量得到改善,玻璃微通道边缘裂损尺寸小于5μm,底面粗糙度Ra值可降低至1.5μm,研究结果将对激光加工玻璃微结构的质量改善提供一定的参考。
[Abstract]:248nm excimer laser direct etching of sodium calcium glass microchannel to fabricate biochip has great advantages and potential, but at present there are some problems such as easy fragmentation and high roughness at the bottom of the microchannel. 248nm excimer laser beam was used to etch sodium calcium glass by static etching and scanning direct writing etching. The relationship between the technological parameters of laser processing glass and the etching quality of glass microchannel was studied experimentally, and then the cracking mechanism of sodium calcium glass etched by 248nm excimer laser was analyzed. Finally, the new process is designed by changing the process parameters to improve the processing quality. The experimental results show that with the increase of laser energy density, the edge crack degree of glass microchannel increases, and the surface roughness increases and the etching quality decreases. In addition, it is found that the rough surface after laser etching can increase the absorption rate of the incident laser energy of the glass material, thus reducing the threshold value of the laser etching glass material, and the roughness of the etching surface can be reduced with lower laser energy density. Finally, the quality of the microchannel is improved by the experiment of technological process improvement. The edge crack size of glass microchannel is less than 5 渭 m, and the roughness Ra value of bottom surface can be reduced to 1.5 渭 m. The research results will provide some reference for improving the quality of glass microstructures fabricated by laser.
【作者单位】：北京工业大学激光工程研究院;
【基金】：国家重大科学仪器设备开发专项资助项目(项目编号:2011YQ030112)
【分类号】：TN249;TQ171.6

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