可循迹纳米台阶标准样版的制备与表征

发布时间：2018-04-27 05:07

本文选题：量值传递 + 刻蚀工艺　；参考：《微纳电子技术》2017年12期

【摘要】：介绍了纳米几何量量值传递中纳米标准样版的计量与溯源特性。分析了微纳米测量仪器在纳米标准样版几何参量校准中对标准样版循迹结构的具体需求。设计了标准值为60 nm,具有可循迹结构的纳米台阶标准样版。为了实现高精度、溯源性表征,基于计量型纳米测量仪(NMM),结合多种定位测量方法,对加工的纳米台阶标准样版进行测量与评价,并对其开展区域均匀性和长时间稳定性实验。实验结果表明,制备的台阶标准样版高度值与设计值基本一致,设计的循迹结构能有效地协助电荷耦合器件(CCD)实现快速循迹与定位,且采用溅射镀膜工艺优化了标准样版表面结构的特性,使多种定位测量方法的测量重复性标准偏差均小于1 nm。
[Abstract]:The metrology and traceability of nanoscale standard plate in the transmission of nanometer geometric quantities are introduced. In this paper, the requirements of the micrometer for the calibration of the geometric parameters of the nanoscale template are analyzed. A standard plate with a traceable structure of nanoscale steps was designed with a standard value of 60 nm. In order to achieve high accuracy and traceability characterization, based on the metrological nano-meter NMMM, combined with a variety of positioning and measurement methods, the standard plate of nanoscale steps was measured and evaluated, and the regional homogeneity and long-time stability experiments were carried out. The experimental results show that the height of the step standard plate is basically the same as the designed value, and the designed track structure can effectively assist the charge coupled device (CCD) to realize fast tracking and positioning. The characteristics of the surface structure of the standard sample plate were optimized by sputtering coating process, and the repeatability standard deviation of various measurement methods was less than 1 nm.
【作者单位】：中国计量大学;上海市计量测试技术研究院;中国电子科技集团公司第十三研究所;
【基金】：国家重大仪器专项资助项目(2014YQ090709)
【分类号】：TB383.1;TN386.5

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