中红外波段仿蛾眼表面高斯面形抗反射微纳结构优化

发布时间：2018-04-29 09:21

本文选题：时域有限差分法 + 高斯面形　；参考：《真空科学与技术学报》2017年05期

【摘要】：基于严格耦合波分析理论,设计中波红外波段3~5μm的仿生蛾眼表面高斯面形周期阵列抗反射微纳结构,用三维有限时域差分法进行仿真模拟优化,分析了结构阵列周期、占空比、刻蚀深度对反射率和透过率的影响,比较高斯面形、抛物面形、圆锥形结构模型抗反射效果,给出了最优化参数组合。分析了加工过程中周期、占空比和刻蚀深度以及外部形状轮廓偏差对蛾眼微纳结构的影响,给出了在要求抗反射效果下允许的结构参数公差尺寸范围和建议加工尺寸,结果得到的抗反射结构反射率低于3%~5%,透过率高于90%。
[Abstract]:Based on the theory of strictly coupled wave analysis, the Gao Si surface periodic array anti-reflective micro-nano structure of midwave infrared wave band 3 ~ 5 渭 m is designed. The simulation optimization is carried out by using three-dimensional finite-difference time-domain method, and the period and duty cycle of the structure array are analyzed. The effect of etching depth on reflectivity and transmittance is compared with Gao Si's surface shape, paraboloid shape and conical structure model, and the optimum parameter combination is given. The effects of the cycle, duty cycle, etching depth and external shape profile deviation on the micronano structure of the moth eye are analyzed. The allowable tolerances of structural parameters and the recommended machining dimensions are given under the requirement of anti-reflection effect. The results show that the reflectivity of the antireflection structure is less than 3 and the transmittance is higher than 90.
【作者单位】：长春理工大学光电工程学院;华中光电技术研究所武汉光电国家实验室;
【基金】：吉林省自然科学基金项目(编号20150101038JC)
【分类号】：TN305.7

【相似文献】