一种磁悬浮平面电机驱动的微位移精密定位平台研究

发布时间：2018-05-02 14:37

本文选题：微位移 + 定位平台　；参考：《哈尔滨工业大学》2015年硕士论文

【摘要】：在集成电路制造业、精密加工行业以及精密测量行业对多自由度精密定位平台的需求和要求都不断增加,对精密定位平台的定位精度、自由度维数、分辨力以及加速度等性能都提出了更高的要求。本文设计了一种改进Y形磁悬浮精密定位平台解决了气浮型定位平台不能在真空环境下工作的问题,同时保证了较高的运动性能。首先,综合国内外已有的磁悬浮定位平台提出了改进Y形磁悬浮微位移精密定位平台,用Halbach永磁阵列取代单个磁钢,将提供悬浮力和驱动力的线圈固定在同一平面上,增加了定位平台的行程同时也加大了控制难度。同时对定位平台动子进行了仿真,仿真结果表明动子的一阶固有频率为446.77Hz,加载后动子中央最大形变量为59nm。其次,对定位平台驱动单元的通电线圈建立了电磁力解析模型。通过对线圈的一维至三维建模获得了通电线圈在Halbach永磁阵列空间磁场中的受力解析模型;根据解析模型的结果,结合本课题所采用的线圈阵列是一维2相线圈阵列,解算得到了各通电线圈的电流分配结果;然后对定位平台进行了位置解耦,最终得到了各线圈电流和个自由度位移之间的对应关系。再次,设计了系统运动控制板卡,板卡的主要资源有由DSP和FPGA组成的主控单元、3路模拟量输入接口、6路模拟量输出接口以及3路光栅尺信号输入接口,并编写了系统的运动控制程序以及人机交互上位机;对定位平台在运动过程中可能会产生的系统误差进行了定量分析,并给出了补偿措施。最后,搭建了实验平台,对本文所设计的改进Y形磁悬浮精密定位平台样机进行了整机实验。实验表明定位平台样机的闭环定位噪声为±0.5μm;定位平台动子z向平动的位移分辨力优于2μm,定位平台动子绕y轴转动的角位移分辨力优于5″,绕x轴转动的角位移分辨力优于7″;定位平台动子空载最大加速度可达9.734m/s2,当动子负载2kg时定位平台的最大加速度为6.502m/s2。
[Abstract]:In the integrated circuit manufacturing industry, precision machining industry and precision measurement industry, the demand and requirements for the multi-degree-of-freedom precision positioning platform are increasing, and the positioning accuracy, the degree of freedom dimension, the precision of the precision positioning platform, the dimension of the degree of freedom, Higher resolution and acceleration are required. In this paper, an improved Y-shaped maglev precision positioning platform is designed to solve the problem that the air-floated positioning platform can not work in vacuum environment, and at the same time, it can guarantee higher motion performance. Firstly, an improved Y-shaped maglev micro-displacement positioning platform is proposed based on the existing maglev positioning platform at home and abroad. The single magnetic steel is replaced by Halbach permanent magnet array, and the coil providing the levitation force and driving force is fixed on the same plane. It increases the travel of the positioning platform and increases the difficulty of control. The simulation results show that the first order natural frequency of the mover is 446.77 Hz and the maximum deformation of the center of the manipulator after loading is 59 nm. Secondly, an analytical model of electromagnetic force is established for the electrified coil of the driving unit of the positioning platform. Through the one-dimensional to three-dimensional modeling of the coil, the force analysis model of the electrified coil in the space magnetic field of the Halbach permanent magnet array is obtained, and according to the results of the analytical model, the coil array used in this paper is one-dimensional and two-phase coil array. The results of the current distribution of the coils are obtained, and then the position decoupling of the positioning platform is carried out, and the corresponding relationship between the current of each coil and the displacement of the individual degrees of freedom is obtained. Thirdly, the system motion control board is designed. The main resource of the card is the main control unit composed of DSP and FPGA. The main control unit consists of three analog input interface and six analog output interface and three grating scale signal input interface. The system motion control program and man-machine interaction host computer are written, and the system errors that may occur in the motion process of the positioning platform are quantitatively analyzed, and the compensation measures are given. Finally, the experimental platform is built, and the prototype of the improved Y-shape magnetic levitation precision positioning platform designed in this paper is tested. The experimental results show that the closed loop positioning noise of the platform prototype is 卤0.5 渭 m, the displacement resolution of the z direction translation of the positioning platform mover is better than 2 渭 m, and the angular displacement resolution of the positioning platform mover is better than 5 ". The angular displacement resolution of rotation around the x axis is better than 7 ", the maximum no-load acceleration of the moving platform can reach 9.734 m / s ~ (2), and the maximum acceleration of the positioning platform is 6.502m / s ~ (2) when the mover loads 2kg.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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