高性能太赫兹无源器件研究

发布时间：2018-05-04 17:42

  本文选题：太赫兹无源器件 + 高性能　； 参考：《电子科技大学》2015年硕士论文

【摘要】：太赫兹波因其特殊的频段位置,具有与其它频段的电磁波不同的性质,这使得太赫兹技术在诸多方面具有重大的科学意义和广泛的应用前景,成为当前学术研究的热点。太赫兹无源器件作为太赫兹系统中重要组成部分,其高性能的设计和最佳的实现方式具有非常积极和重要的意义。本文围绕太赫兹频段波导滤波器、定向耦合器展开研究。基于具有实用前景的微细加工技术与超精密机械加工技术,通过考察现今国内外发展动态以展开对高性能无源器件研究。基于滤波器和定向耦合器的设计理论,通过精确设计,结合超精密机械加工技术和微细加工技术中的深反应离子刻蚀(DRIE)加工工艺完成了高性能的器件制作。其主要研究工作和成果可以概括为:1、太赫兹波导滤波器研究(1)在太赫兹低频段,基于超精密机械加工技术,采用多种耦合形式设计出结构简单、性能优越的220 GHz以及340 GHz两种波导滤波器。加工成品为集滤波结构和法兰盘结构于一体的H面偏移感性窗耦合结构220 GHz波导滤波器和E面膜孔感性窗耦合结构340 GHz波导滤波器。采用矢量网络分析仪测试系统测试成品元件S参数,测试结果表明波导滤波器插入损耗均小于1dB,回波损耗优于17dB,测试结果与仿真结果完全吻合,设计出性能优越的波导滤波器。(2)在太赫兹较高频段,基于DRIE加工工艺,采用多种耦合结构设计出0.95THz波导滤波器,为国内外首次将频段提高到近1THz的波导无源器件的研究与探索。目前0.95THz波导滤波器已经研制成功,滤波结构封装于硅质长方体单元中,并设计出与之配套的夹具协助测试,测试结果良好,与仿真结果基本吻合。2、太赫兹波导10dB定向耦合器的研制工作基于DRIE加工工艺,加工制备了E面340GHz矩形波导10dB定向耦合器,采用阶梯型五分支线电桥耦合形式和田字型电桥耦合形式两套方案。耦合结构封装于硅质长方体单元中,并设计配套夹具进行测试,测试结果与设计基本吻合。本文成功研制了高性能太赫兹无源器件,对太赫兹系统的研究发展具有重大的实用价值。
[Abstract]:Because of its special position of frequency band, terahertz wave has different properties from other electromagnetic waves, which makes terahertz technology has great scientific significance and wide application prospect in many aspects, and has become a hot topic in current academic research. As an important part of terahertz system, the high performance design and optimal implementation of THz passive devices are of great significance. This paper focuses on the THz waveguide filter and directional coupler. Based on the micromachining technology and ultra-precision machining technology, the research on high performance passive devices is carried out by reviewing the development trends at home and abroad. Based on the design theory of filter and directional coupler, high performance devices were fabricated by precise design, combined with ultra-precision machining technology and deep reactive ion etching technology. The main research work and results can be summarized as follows: 1) in terahertz low frequency band, based on ultra-precision machining technology, simple structure is designed in various coupling forms. Excellent performance of 220 GHz and 340 GHz waveguide filter. The finished product is an H-plane offset inductive window coupling structure of 220 GHz waveguide filter and an E-face hole inductive window coupling structure of 340 GHz waveguide filter which integrates the filter structure and the flange structure. The S parameters of the finished components were measured by vector network analyzer. The results show that the insertion loss of waveguide filter is less than 1 dB, and the return loss is better than 17 dB. The test results are in good agreement with the simulation results. The waveguide filter with superior performance is designed in the high frequency band of terahertz. Based on the fabrication technology of DRIE, the 0.95THz waveguide filter is designed using a variety of coupling structures. It is the first time to study and explore the passive waveguide devices which can improve the frequency band to near 1THz at home and abroad. At present, the 0.95THz waveguide filter has been successfully developed. The filter structure is encapsulated in the silicon cuboid unit, and a matching fixture is designed to assist the test. The test results are satisfactory. The development of 10dB directional coupler for terahertz waveguide is based on the DRIE process. The E-plane 340GHz rectangular waveguide 10dB directional coupler is fabricated. Two kinds of coupling schemes are adopted: the coupling form of stepped five branch line bridge and the coupling form of Tian zigzag bridge. The coupling structure is encapsulated in the silicon cuboid unit, and the matching fixture is designed for testing. The test results are in good agreement with the design. In this paper, high performance THz passive devices have been successfully developed, which is of great practical value for the research and development of terahertz systems.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN713;TN622
，

本文编号：1843965