基于静电驱动可重构超材料的太赫兹可调滤波器

发布时间：2018-05-05 23:00

本文选题：太赫兹 + 可重构超材料　；参考：《桂林电子科技大学》2017年硕士论文

【摘要】：太赫兹滤波器可以滤除不需要的频率和噪声,以提高太赫兹系统的性能。超材料是一种具有特殊电磁响应特性的人工复合材料或结构。目前,商业化的太赫兹滤波器只能选择特定频率的太赫兹波,其阻带或通带中心频率位置和幅值都不可调节,从而大大限制了滤波器的适用范围。因此,太赫兹可调滤波器是当前太赫兹领域急需要的一个重要功能器件。本论文主要开展基于静电驱动可重构超材料的太赫兹可调滤波器研究,具体内容如下:(1)基于微机电系统的静电梳齿驱动器研究。重点研究了驱动器各个结构参数对驱动器最大位移量的影响。静电梳齿驱动器与可动框架通过弹簧结构相连。当在静电梳齿驱动器上施加直流电压时,静电梳齿驱动器会带动可动框架移动。在30V的直流电压下,驱动器最大位移量可达到3微米。(2)基于静电驱动可重构超材料的可调太赫兹带阻滤波器研究。设计了一种由倒梯形环结构和一字型结构组成的可调太赫兹滤波器。当两者间距为3微米时,阻带的中心频率位于1.25THz;当两者间距为0(接触)时,阻带的中心频率为0.98THz,阻带中心频率的调制度达到21.6%。利用时域有限积分方法研究了该滤波器的滤波机理和滤波器结构参数对滤波特性的影响。(3)基于静电驱动可重构超材料的可调太赫兹带通滤波器研究。设计了一种可调带通滤波器,该滤波器中央单元由一个可动横杆和两个开口环构成。当可动横杆位于两个开口环中间时,滤波器有两个通带,各通带的中心频率分别为0.65THz和0.95THz。当可动横杆接近下开口环时,高频通带的透射幅值会逐渐减小直至变为0。利用时域有限积分方法研究了该滤波器的滤波机理和滤波器结构参数对滤波特性的影响。并用绝缘体上硅(Silicon-On-Isolator:SOI)体硅工艺加工出了样片,用太赫兹时域光谱系统对滤波器性能进行了测试。结果表明,驱动电压U=120V时,高通带中心频率处的透射幅值接近于0,仿真结果与实验结果基本一致。
[Abstract]:Terahertz filters can filter unwanted frequencies and noises to improve the performance of terahertz systems. Metamaterials are artificial composites or structures with special electromagnetic response. At present, the commercial THz filter can only select the terahertz wave at a specific frequency. The position and amplitude of the center frequency of the stopband or passband can not be adjusted, which greatly limits the application range of the filter. Therefore, terahertz tunable filter is an important functional device which is urgently needed in the field of terahertz. This thesis mainly focuses on the research of THz tunable filter based on electrostatic drive reconfigurable supermaterial. The main contents are as follows: (1) Electrostatic comb driver based on MEMS. The effect of structural parameters on the maximum displacement of the driver is studied. Electrostatic comb driver and movable frame are connected by spring structure. When the DC voltage is applied on the electrostatic comb driver, the electrostatic comb driver will move the movable frame. At a DC voltage of 30 V, the maximum displacement of the driver can reach 3 micron. 2) A tunable terahertz band-stop filter based on electrostatic driven reconfigurable supermaterial is studied. A tunable terahertz filter consisting of an inverted trapezoid ring structure and a glyph structure is designed. When the distance between them is 3 渭 m, the center frequency of the stopband is 1.25THz. when the distance between them is 0 (contact), the central frequency of the stopband is 0.98 THZ, and the regulation of the central frequency of the stopband reaches 21.6b. The filtering mechanism of the filter and the influence of the filter structure parameters on the filter characteristics are studied by using the time-domain finite integral method. The tunable terahertz band-pass filter based on electrostatic driven reconfigurable supermaterial is studied. A tunable bandpass filter is designed. The central unit of the filter consists of a movable crossbar and two open loops. When the movable crossbar is in the middle of two open rings, the filter has two passbands, each of which has a central frequency of 0.65THz and 0.95THZ respectively. When the movable cross bar approaches the lower opening ring, the transmission amplitude of the high frequency passband will gradually decrease to 0. The filtering mechanism of the filter and the influence of the filter structure parameters on the filter characteristics are studied by using the time-domain finite integral method. Samples have been fabricated by using Silicon-On-Isolator: SOI bulk silicon process on insulators. The performance of the filter has been tested by terahertz time-domain spectroscopy system. The results show that the transmission amplitude at the center frequency of the high pass band is close to 0 when the driving voltage is U _ (120V), and the simulation results are in good agreement with the experimental results.
【学位授予单位】：桂林电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN713

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