熔融硅在水平管道凝固过程的数值分析

发布时间：2018-05-06 18:20

  本文选题：数值分析 + 熔融硅　； 参考：《热加工工艺》2017年09期

【摘要】：使用COMSOL Multiphysics模拟计算软件,建立了水平管道凝固模型,采用自适应网格划分法划分网格,在温度场和流场耦合作用下,对熔融硅在水平管道中的凝固过程进行数值模拟。模拟结果显示:在熔融硅的凝固过程中,在靠近坩埚口壁面附近出现了流线形状的波纹,并形成了漩涡流。在凝固区和结晶区熔融硅释放了大量的潜热,其外边界热流密度较大。该研究为获得超薄硅片成形所需的稳定生长环境和制备更为平整的薄片提供理论依据。
[Abstract]:In this paper, the solidification model of horizontal pipeline is established by using COMSOL Multiphysics software. The numerical simulation of the solidification process of molten silicon in horizontal pipeline is carried out under the coupling of temperature field and flow field. The simulation results show that in the solidification process of molten silicon, the ripples with streamline shape appear near the wall of the crucible mouth, and a swirl flow is formed. A large amount of latent heat is released from molten silicon in solidification and crystallization regions, and its external boundary heat flux is high. This study provides a theoretical basis for obtaining the stable growth environment and preparing more flat wafers for ultra-thin silicon wafer forming.
【作者单位】： 江苏大学微纳米科学技术研究中心;常州大学江苏省光伏科学与工程协同创新中心;
【基金】：国家自然科学基金重点项目(51335002)
【分类号】：TN304.12
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本文编号：1853368