冲击式多晶硅破碎装置的研究与设计

发布时间：2018-05-09 15:31

本文选题：多晶硅 + 损伤分析　；参考：《石河子大学》2017年硕士论文

【摘要】：多晶硅(Polysilicon)作为半导体材料所使用的基础材料,在微电子技术和光伏发电技术中应用普遍,被称为“微电子大厦的基石”。多晶硅破碎长久以来一直是采用人工使用镶嵌硬质合金或者碳化钨合金的破碎锤进行敲碎作业,即使在一些多晶硅技术较先进的国家也一贯采用这种破碎方式。人工破碎灵活性好,但破碎效率低,破碎过程中产生的粉尘,对工人健康危害较大。随着国内多晶硅企业的规模和集中度大幅提升,人工破碎已难以满足生产需求,自动化破碎是多晶硅破碎发展的必然趋势。本文以多晶硅在冲击作用下的损伤裂纹扩展的基础上,研究设计了冲击式多晶硅破碎装置。采用Pro/E三维建模软件建立了破碎装置的三维模型,对破碎装置的主要零部件进行了静力学分析,并对破碎装置进行了PLC运控控制的编写。1、采用AUTODYN软件,结合脆性材料的损伤本构模型,对多晶硅棒在平面破碎锤和圆头破碎锤对多晶硅棒进行冲击损伤模拟,观察其各自的裂纹扩展分布情况。平面锤头冲击下裂纹扩展较快且扩展区域更广,圆锤头裂纹扩展较慢。经分析,平面锤头更适合多晶硅的破碎,圆点的作用更适合作为辅助破碎。根据这部分的损伤模拟分析,为冲击式多晶硅破碎装置提供了理论依据。2、根据冲击式多晶硅破碎装置的设计要求,以冲击作用下多晶硅损伤裂纹扩展为基础,提出冲击式多晶硅破碎装置的总体设计方案,对传动部分进行选型,对关键零部件进行设计,最后采用Pro/E进行装置的整体三维建模。3、采用ANSYS有限元分析软件对装置的关键零部件进行静力学仿真,分析了关键零部件在作业过程的可靠性。4、使用PLC可编程逻辑控制器,根据所要求的破碎步骤,采用GX-Developer软件编写梯形图指令,实现破碎装置的自动化控制。经软件仿真模拟,指令编写正确。
[Abstract]:Polysilicon, as the basic material used in semiconductor materials, is widely used in microelectronics and photovoltaic power generation technology. It is called "the cornerstone of microelectronics building". For a long time, the crushing of polysilicon has been done by using hammer embedded in cemented carbide or tungsten carbide, even in some countries with advanced polysilicon technology. The artificial crushing has good flexibility, but the crushing efficiency is low, and the dust produced in the crushing process is harmful to workers' health. With the increase of the scale and concentration of polysilicon enterprises in China, it is difficult to meet the production demand by artificial crushing. Automatic crushing is the inevitable trend of the development of polysilicon crushing. On the basis of damage crack propagation of polysilicon under impact, an impact polysilicon crushing device is designed in this paper. The 3D model of the crushing device is established by using Pro/E software. The main parts of the crushing device are statically analyzed, and the PLC operation control is compiled for the crushing device. The AUTODYN software is used to control the crushing device. Combined with the damage constitutive model of brittle materials, the impact damage of polysilicon bar on plane and round head was simulated, and their crack propagation distribution was observed. Under the impact of the plane hammer, the crack growth is faster and the propagation area is wider, and the crack growth of the circular hammer is slower. The analysis shows that the plane hammer is more suitable for the breaking of polysilicon and the dot is more suitable for the auxiliary crushing. According to the damage simulation analysis of this part, it provides a theoretical basis for the impact polysilicon crushing device. According to the design requirements of the impact polysilicon crushing device, it is based on the damage crack propagation of the impact polysilicon. The overall design scheme of the impact polysilicon crushing device is put forward. The type selection of the transmission part and the design of the key parts are carried out. Finally, the whole 3D modeling of the device is built by Pro/E. The statics simulation of the key parts of the device is carried out by using ANSYS finite element analysis software. The reliability of the key parts in the operation process is analyzed. The reliability of the key parts is analyzed. The PLC programmable logic controller is used. According to the required crushing steps, the GX-Developer software is used to write the ladder diagram instruction to realize the automatic control of the crushing device. Through the simulation of software, the instruction is written correctly.
【学位授予单位】：石河子大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN304.12

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