品质因数对薄膜体声波谐振器振荡器频率稳定度的影响

发布时间：2018-05-09 15:38

本文选题：薄膜体声波谐振器 + Pierce振荡器　；参考：《强激光与粒子束》2017年05期

【摘要】：在薄膜体声波谐振器(FBAR)振荡器中,振荡器的有载品质因数(QL)和FBAR的品质因数(Q值)均与振荡器的频率稳定度有关。为了研究这两种品质因数对FBAR振荡器频率稳定度的影响,在COMSOL Multiphysics软件中建立了FBAR的多物理场模型,通过频域仿真和MBVD(Modified Butterworth-Van Dyke)模型参数拟合,得到了MBVD模型参数,并在ADS软件中建立了MBVD模型电路,通过S参数仿真结合求取Q值的Bode法得到了不同损耗对应的Q值;再建立基于Pierce架构的振荡器,通过谐波平衡仿真得到了相位噪声,通过分别改变QL和Q得到了二者对FBAR振荡器频率稳定度的影响。结果表明:频率稳定度随QL和Q的增大而增大,Q值随不同损耗的增大而减小。当FBAR的Q值低于338时,即使通过增大QL来提高频率稳定度,其效果也不佳,以此FBAR构成的振荡器将不能满足作为无线通信射频前端参考信号源或者FBAR传感器读出电路的要求。为FBAR参考信号源和FBAR传感器读出电路的设计提供了一定的参考。
[Abstract]:In thin film bulk acoustic resonator (FBA) oscillator, the loaded quality factor (QL) and the quality factor (Q) of FBAR are both related to the frequency stability of the oscillator. In order to study the influence of these two quality factors on the frequency stability of FBAR oscillator, the multi-physical field model of FBAR is established in COMSOL Multiphysics software. The MBVD model parameters are obtained by frequency domain simulation and MBVD(Modified Butterworth-Van Dyke model parameter fitting. The MBVD model circuit is set up in ADS software, the Q value corresponding to different loss is obtained by S parameter simulation combined with the Bode method of Q value, then the oscillator based on Pierce architecture is built, and the phase noise is obtained by harmonic balance simulation. By changing QL and Q, the influence of QL and Q on the frequency stability of FBAR oscillator is obtained. The results show that the frequency stability increases with the increase of QL and Q, and decreases with the increase of loss. When the Q value of FBAR is lower than 338, even if the frequency stability is improved by increasing QL, the effect is not good. The oscillator constructed by this FBAR will not meet the requirements of the RF front-end reference signal source or the readout circuit of FBAR sensor in wireless communication. It provides some reference for the design of FBAR reference signal source and FBAR sensor readout circuit.
【作者单位】：西南科技大学信息工程学院;中国工程物理研究院电子工程研究所;中国科学院高能物理研究所核探测与核电子学国家重点实验室;
【基金】：国家自然科学基金项目(61574131) 中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001) 西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14zxtk01);西南科技大学研究生创新基金项目(15ycx125) 核探测与核电子学国家重点实验室开放课题(2016KF02)
【分类号】：TN65

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