气液固三相磨粒流抛光加工装置设计及其加工实验研究
发布时间:2018-05-09 22:05
本文选题:气液固三相磨粒流 + 高速旋流流场 ; 参考:《浙江工业大学》2015年硕士论文
【摘要】:气液固三相磨粒流抛光加工,是一种利用处于湍流状态的气液固三相高速旋流磨粒流对大面积平面工件表面进行精密抛光加工的一种新方法。本论文通过对磨粒流在不同入射角状态下的流场特性进行数值模拟,分析运动规律,得出最佳结构设计参数。基于数值模拟结果,设计抛光加工工具并搭建实验装置平台,进行加工实验研究。主要内容如下:(1)以大平面光学及半导体器件表面的精密加工制造难题作为研究背景,在对国内外各类已有加工方法进行调研的基础上,指出流体加工方法的优势所在。综述当前流体加工方法的发展概况及优缺点,基于气泡溃灭理论,提出了气液固三相磨粒流抛光加工新方法。(2)基于Realizable k-ε湍流模型与Mixture模型,建立了气液固三相磨粒流抛光加工过程的理论分析模型。通过对磨粒流在不同入射角状态下的流场特性进行数值模拟,分析其运动规律,得到磨粒流入射流道的最佳结构设计参数,为抛光加工工具的设计加工提供指导。(3)搭建实验装置平台,基于数值仿真分析结果,选择合适的磨粒流配比及加工工艺方案。分别进行添加微米级气泡的气液固三相磨粒流、添加毫米级气泡的气液固三相磨粒流以及不添加气泡的液固两相磨粒流抛光加工实验,实验结果表明:添加微气泡的气液固三相磨粒流抛光加工中,高速旋流流场中的微气泡溃灭对周围磨粒产生一定的加速推动作用,其对工件表面的抛光加工效率最高,经10小时加工后工件表面的粗糙度、均匀性也最好。
[Abstract]:Gas-liquid-solid three-phase abrasive flow polishing is a new method for precision polishing of large area planar workpiece surface by using gas-liquid-solid three-phase high-speed swirl abrasive flow in turbulent state. In this paper, the flow field characteristics of abrasive flow at different incident angles are numerically simulated, the motion law is analyzed, and the optimum structural design parameters are obtained. Based on the numerical simulation results, the polishing tool was designed and the experimental platform was set up. The main contents are as follows: (1) based on the research background of large plane optics and precision manufacturing problems of semiconductor devices, the advantages of fluid processing methods are pointed out on the basis of investigation of all kinds of existing machining methods at home and abroad. Based on the theory of bubble collapse, a new method of gas-liquid-solid three-phase abrasive flow polishing is proposed, which is based on Realizable k- 蔚 turbulence model and Mixture model. The theoretical analysis model of gas-liquid-solid three-phase abrasive flow polishing process is established. Through the numerical simulation of the flow field characteristics of the abrasive particle flow at different incident angles and the analysis of its motion law, the optimum structural design parameters of the abrasive particles flowing into the jet channel are obtained. To provide guidance for the design and machining of polishing tools, an experimental platform is set up. Based on the results of numerical simulation, appropriate abrasive flow ratio and processing technology are selected. Experiments were carried out on gas-liquid-solid three-phase abrasive flow with micron size bubble, gas-liquid-solid three-phase abrasive particle flow with millimeter bubble and liquid-solid two-phase abrasive flow polishing without adding bubble, respectively. The experimental results show that in the gas-liquid-solid three-phase abrasive flow polishing process with microbubbles, the micro-bubble collapse in the high-speed swirl flow field has a certain accelerating effect on the surrounding abrasive particles, and the polishing efficiency on the workpiece surface is the highest. After 10 hours of processing, the workpiece surface roughness, uniformity is also the best.
【学位授予单位】:浙江工业大学
【学位级别】:硕士
【学位授予年份】:2015
【分类号】:TN305.2
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