光栅刻划机直线度误差补偿的研究

发布时间：2018-05-10 06:19

本文选题：中阶梯光栅 + 超精密单点金刚石车床　；参考：《光谱学与光谱分析》2017年03期

【摘要】：中阶梯光栅是一种特殊的衍射光栅,它以高的衍射级次和大的衍射角来工作,具有高分辨率、全波闪耀等特性。已广泛应用于高端光谱仪器之中,极大地促进了航天航空、天文、医疗、军事、环境等尖端科技的发展。但是专业的刻划系统需要定制,价格昂贵。使用已成熟的超精密加工设备来加工中阶梯光栅,可以大大降低中阶梯光栅母版的制备成本。超精密单点金刚石车床制备中阶梯光栅时,系统直线度不好,存在较大的累积误差,导致中阶梯光栅衍射波前较差,达不到制备要求。为了减小超精密单点金刚石车床固有的直线度误差,对超精密单点金刚石车床进行了误差补偿。首先,以累积误差曲线为依据进行第一次补偿。实验结果表明,当补偿系数为0.75~0.85时,此时衍射波前的PV(峰谷值)值在约400 nm,一次直线度补偿效果到达极限。然后,以闪耀级的衍射波前曲线为依据进行第二次直线度补偿,二次补偿后的衍射波前PV值为约83 nm。补偿后的结果表明衍射波前得到大幅改善,有利于提高所制备光栅的质量,在光栅实际刻划中具有指导作用。
[Abstract]:Middle step grating is a kind of special diffraction grating. It works with high diffraction order and large diffraction angle. It has the characteristics of high resolution and full wave blazing. It has been widely used in high-end spectrometer, and has greatly promoted the development of aerospace, astronomy, medical, military, environment and other cutting-edge technology. But a professional description system needs to be customized and expensive. The production cost of medium step grating master plate can be greatly reduced by using mature ultra-precision machining equipment to process middle step grating. In the preparation of middle step grating by ultra-precision single point diamond lathe, the linearity of the system is not good, and there is a large cumulative error, which leads to the poor diffraction wave front of the middle step grating, which can not meet the preparation requirements. In order to reduce the inherent straightness error of ultra-precision single-point diamond lathe, the error compensation of ultra-precision single-point diamond lathe was carried out. First, the first compensation is based on the cumulative error curve. The experimental results show that when the compensation coefficient is 0.75 ~ 0.85, the PV-value of diffraction wave front is about 400 nm, and the linear compensation effect reaches the limit. Then the second straightness compensation is carried out on the basis of the diffraction wavefront curve of the blazed stage, and the PV value of the diffraction wave front after the quadratic compensation is about 83 nm. The compensation results show that the diffraction wavefront is greatly improved, which is helpful to improve the quality of the gratings prepared, and has a guiding role in the actual characterization of the gratings.
【作者单位】：教育部光学仪器与系统工程研究中心;上海市现代光学系统重点实验室;
【基金】：国家自然科学基金项目(61378060.61205156) 上海市科学仪器重点项目(14142200902)资助
【分类号】：TN25

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