基于激光错位散斑干涉的无损检测技术研究

发布时间：2018-05-18 09:04

本文选题：无损检测 + 错位散斑干涉　；参考：《合肥工业大学》2016年硕士论文

【摘要】：无损检测技术在航空航天、机械、材料及先进制造中的产品部件的机械力学性能(变形、缺陷等)的监测和设备在役检查中发挥着重要作用。激光错位散斑干涉技术(Shearography)因其具有全场、非接触、高精度和高灵敏度的优势,从而成为无损检测技术中一种常用的高效方法,目前基于激光错位散斑干涉的无损检测技术的基本测量理论与实现方法已得到较多研究,但是一些关键技术与应用潜力还有待于进一步分析研究。本文针对激光错位散斑干涉技术中的相关关键技术问题进行研究,具体的研究工作主要包括：(1)详细介绍了激光错位散斑干涉的无损检测技术原理,并对其关键技术进行了理论分析与实验研究。(2)对空间载波相移技术中关键参数的确定进行了理论分析以及实验验证。详细讨论了光路中光阑类型、光阑尺寸、CCD的空间分辨率、错位量、错位方向等参数与错位散斑干涉技术应用的关系,确定了它们的选取类型和取值范围。(3)讨论了使用大错位量错位散斑干涉测量和位移导数积分直接测量物体的形变位移的方法。对以上讨论的方法均进行了实验验证,并对导数积分方法与电子散斑干涉测量位移方法进行了实验对比分析。(4)将错位散斑干涉技术应用到了SU-8光刻胶的应变分布检测中。设计激光错位散斑干涉无损检测系统,对SU-8光刻胶进行了应变分布检测,对比分析了检测结果与仿真结果,验证了错位散斑干涉技术在新应用领域的无损检测能力,为该技术的新应用提供参考。
[Abstract]:Non-destructive testing (NDT) technology plays an important role in the monitoring of mechanical and mechanical properties (deformation, defects, etc.) of aerospace, machinery, materials and parts in advanced manufacturing, and in in-service inspection. Because of its advantages of full field, non-contact, high precision and high sensitivity, laser staggered speckle interferometry has become a common and efficient method in nondestructive testing. At present, the basic measurement theory and implementation methods of nondestructive testing technology based on laser dislocation speckle interferometry have been studied, but some key technologies and application potential still need to be further analyzed and studied. In this paper, the key technical problems in laser dislocation speckle interferometry are studied. The detailed research work includes the detailed introduction of the principle of nondestructive detection of laser dislocation speckle interferometry. The theoretical analysis and experimental study of the key technology are also carried out. (2) the determination of the key parameters in the space carrier phase shift technology is theoretically analyzed and verified by experiments. The relationship between the type of aperture in optical path, the spatial resolution of aperture size and CCD, the amount of dislocation, the direction of dislocation, and the application of staggered speckle interferometry are discussed in detail. The selection type and value range of them are determined. The methods of using large dislocation speckle interferometry and displacement derivative integral to directly measure the deformation displacement of an object are discussed. The methods discussed above have been verified experimentally, and the derivative integral method and the electronic speckle interferometric displacement measurement method have been compared and analyzed experimentally. (4) the staggered speckle interferometry has been applied to the strain distribution detection of SU-8 photoresist. The nondestructive testing system of laser dislocation speckle interferometry was designed. The strain distribution of SU-8 photoresist was detected. The results of test and simulation were compared and the ability of nondestructive testing of dislocation speckle interferometry in the new application field was verified. It provides a reference for the new application of this technology.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN247

【相似文献】