基于模型识别与动力学响应等效的运动参数优化

发布时间：2018-05-19 23:00

本文选题：高速 + 高精度　；参考：《广东工业大学》2016年硕士论文

【摘要】：随着微电子技术的发展,高精度、高速度、高加速已成为现代微电子加工指标要求。要满足高速、高精度的运动平台加工性能要求,在对运动系统中机械结构优化的同时,改善控制技术,提高驱动性能也迫在眉睫。本文针对高速、高精度的运动平台,为满足运动平台的高速、高精度要求,提出了一种基于运动平台模型识别和动力学响应等效的运动参数优化方法,这种方法将被用于提高运动平台的精度,减小平台定位时间和减轻振动。文中通过分析常用的运动控制系统,采用半闭环、位置控制的运动方案,选用了大族直线电机平台、大族伺服驱动器和NI PXI-7350运动控制卡搭建了运动控制系统,建立了研究对象。直线运动平台是多组件间相互作用的运动平台,在运动中,各组件的振动会对平台的运动和定位产生影响,使定位精度难以提高；因此,本文通过对直线运动平台进行动力学响应分析,研究电机平台在运动中存在不同阶次的模态响应；经过模态分解,分离平台存在的多模态响应,并研究产生模态响应各组件之间相互关系,建立了运动平台的等效简化模型。对于等效模型的参数识别,文中采用实验模态测试的方法获得了等效模型实际的频率；考虑到平台在运动结束时,产生的是有阻尼自由振动,将等效模型的运动等效为单自由度系统运动,通过单自由度振动指数衰减法,计算出运动平台系统的物理参数,即等效刚度、等效阻尼和等效质量,从而建立起了一个完整的等效模型。运动参数优化是运动曲线参数化的目标,运动规划是运动参数优化的前提,本文选取了工业控制中常用的、具代表性的S型速度曲线,通过运动规划,设定的运动参数为加加速度G1、G2、G3、G4,通过等效模型仿真的参数优化,设定定位精度为3微米,在满足定位时间最短的条件下,优化出最优运动参数G1、G2、G3、G4。同时为了验证优化参数的实际效果,把优化参数设置在搭建好的运动控制系统中,通过实际运行测试,比较优化和实际运行结果。验证了参数优化方法确实能有效的减小定位时间,减轻振动,提高运动精度。
[Abstract]:With the development of microelectronics technology, high precision, high speed and high acceleration have become the requirements of modern microelectronic machining. In order to meet the requirements of machining performance of high speed and high precision motion platform, it is urgent to improve the control technology and drive performance while optimizing the mechanical structure in the motion system. In order to meet the requirement of high speed and high precision for high speed and high precision motion platform, a motion parameter optimization method based on motion platform model recognition and equivalent dynamic response is proposed in this paper. This method will be used to improve the accuracy of the platform, reduce the positioning time and reduce the vibration. By analyzing the motion control system in common use, the motion control system is constructed by using the motion scheme of semi-closed loop and position control, the platform of the large family linear motor, the large family servo driver and the NI PXI-7350 motion control card, and the research object is established. The linear motion platform is a moving platform that interacts with multiple components. In motion, the vibration of each component will have an impact on the motion and positioning of the platform, which makes the positioning accuracy difficult to improve. In this paper, by analyzing the dynamic response of the linear motion platform, we study the modal response of the motor platform with different order in motion, and separate the multi-modal response of the platform by mode decomposition. The equivalent simplified model of the motion platform is established by studying the relationship among the components that generate the modal response. For the parameter identification of the equivalent model, the actual frequency of the equivalent model is obtained by using the method of experimental modal test, considering that the free vibration with damping is generated at the end of the motion of the platform. The motion of the equivalent model is equivalent to the motion of the system with single degree of freedom. The physical parameters of the motion platform system, namely equivalent stiffness, equivalent damping and equivalent mass, are calculated by the method of vibration exponential attenuation of the single degree of freedom. Thus a complete equivalent model is established. Motion parameter optimization is the goal of motion curve parameterization, and motion planning is the premise of motion parameter optimization. The kinematic parameter is G1G2G2G3G4 with acceleration. Through the parameter optimization of equivalent model simulation, the positioning precision is set to 3 micron. Under the condition of the shortest positioning time, the optimal motion parameter G1G2G2G3G4 is optimized. At the same time, in order to verify the actual effect of the optimization parameters, the optimized parameters are set up in a well-built motion control system, and the results of the optimization and the actual operation are compared through the actual running tests. It is proved that the parameter optimization method can effectively reduce the positioning time, reduce vibration and improve the motion accuracy.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN05

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