激光束束形参数检测技术研究

发布时间：2018-05-20 04:01

本文选题：激光波前 + 二维光栅　；参考：《西安工业大学》2015年硕士论文

【摘要】：作为高精度测试装置的激光器,其设计和加工精度、输出参数的准确度、与设计值的偏差程度、工作期间的稳定性将直接传递到被测件的测量中,因此激光器自身输出参数的测试显得尤为重要。本文采用四波横向剪切干涉法对激光束参数进行检测研究,其具有分辨率高、操作性强、稳定性好、对振动不敏感以及结构紧凑等优点。在对目前常用的波前检测方法进行深入研究及讨论的基础上,本文详细论述了四波横向剪切干涉的基本工作原理。实现该原理的二维衍射光栅作为其关键器件,它是在传统的哈特曼波前传感器掩膜板的基础上加工了具有一定相位差值的相位光栅。四波横向剪切干涉系统由一个二维衍射光栅和一个CCD相机组成。当光束通过二维衍射光栅后,在CCD相机的接收屏就会产生剪切光斑,从而形成干涉图。空间载频法对实验装置没有特殊要求,可在动态测量中进行相位与光强的提取。借助于干涉图的处理技术,对其进行相位提取,相位解包,可得到两个正交方向的差分信息,采用Zernike多项式最小二乘法拟合波面,可获得原始波前。为了验证本课题中方案的可行性,本文采用了四波横向剪切干涉测波前,实验中对532nm半导体激光器进行测试,并对测量数据与激光器标称参数对比；并且分别利用四波横向剪切干涉法与ZYGO-GPI干涉仪对被测件进行比对测试,可以得到四波横向剪切干涉法的测试精度为RMS15nm,重复性精度为8nm。实验结果表明,四波前横向剪切干涉法可以精确、快速地测试激光波前信息,为波面检测提供了很好的研究方法。
[Abstract]:As a high precision measuring device, the design and machining accuracy, the accuracy of output parameters, the deviation from the design value, the stability of the laser during work will be transferred directly to the measurement of the tested parts. Therefore, the measurement of laser output parameters is particularly important. In this paper, four-wave transverse shear interferometry is used to detect laser beam parameters. It has the advantages of high resolution, strong maneuverability, good stability, insensitivity to vibration and compact structure. Based on the deep research and discussion of the commonly used wave-front detection methods, the basic principle of four-wave transverse shearing interference is discussed in detail in this paper. The two-dimensional diffraction grating which realizes this principle is the key device. It is based on the traditional mask plate of the Hartmann wavefront sensor to fabricate the phase grating with a certain phase difference value. The four wave transverse shear interferometry system consists of a two-dimensional diffraction grating and a CCD camera. When a beam passes through a two-dimensional diffraction grating, a shearing spot will be produced on the receiving screen of the CCD camera, thus forming an interferogram. The spatial carrier frequency method has no special requirement for the experimental device, and it can be used to extract the phase and light intensity in the dynamic measurement. With the help of the interferogram processing technique, the phase extraction and phase unwrapping can get the difference information of two orthogonal directions. The Zernike polynomial least square method is used to fit the wavefront, and the original wavefront can be obtained. In order to verify the feasibility of the scheme, the four-wave transverse shear interferometry is used to measure the 532nm semiconductor laser in the experiment, and the measured data are compared with the nominal parameters of the laser. The four wave transverse shear interferometry and the ZYGO-GPI interferometer are used to compare and test the measured samples. The accuracy of the four wave transverse shear interferometry is RMS 15nm and the repeatability is 8 nm. The experimental results show that the four-wave front transverse shearing interferometry can accurately and quickly test the laser wavefront information, which provides a good research method for wave surface detection.
【学位授予单位】：西安工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248

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