基于微机电系统的法布里珀罗可调光滤波器

发布时间：2018-05-20 22:08

本文选题：光纤光学 + 微机电系统　；参考：《中国激光》2017年06期

【摘要】：为实现调谐范围宽、调谐速度快、带宽窄、驱动电压低以及可批量化生产的可调光学滤波器,提出了一种新型微机电系统(MEMS)可调光学滤波器。由高反射率可动光学镜面与准直扩束光纤端面组成法布里-珀罗(F-P)腔。通过静电驱动改变F-P腔的腔长以调整滤波器的输出光波长,分析了可调光学滤波器的波长调谐原理和静电驱动原理,给出了器件的结构参数和综合设计考虑。利用体硅加工工艺成功制作了可调光学滤波器样品,并进行了实验测试。实验结果表明,通过改变准直扩束光纤的初始位置,3dB带宽与自由谱域之间具有可调性。该可调光学滤波器兼备了MEMS技术与光纤技术的优点,并且结构紧凑、工艺简单、驱动电压低,可用于光通信等场合。
[Abstract]:In order to realize tunable optical filters with wide tuning range, fast tuning speed, narrow band width, low driving voltage and batch production, a new type of MEMS tunable optical filter is proposed. The Fabry-Perot Fabry-Perot (F-P) cavity is composed of a high reflectivity movable optical mirror and a collimated beam extension fiber. The wavelength tuning principle and electrostatic driving principle of tunable optical filter are analyzed by changing the cavity length of F-P cavity to adjust the output wavelength of the filter by electrostatic drive. The structure parameters of the device and the comprehensive design considerations are given. The tunable optical filter samples were fabricated by bulk silicon process and tested experimentally. The experimental results show that by changing the initial position of the collimated beam extender fiber, the 3dB bandwidth is adjustable to the free spectrum domain. The tunable optical filter has the advantages of both MEMS technology and optical fiber technology. It has the advantages of compact structure, simple process, low driving voltage, and can be used in optical communication.
【作者单位】：上海大学理学院;中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室;
【基金】：国家重大科学仪器设备开发专项(2012YQ250002)
【分类号】：TN713

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