基于激光干涉比长仪的光栅线间距测量系统的研究

发布时间：2018-05-28 00:14

本文选题：光栅尺 + 激光干涉比长仪　；参考：《中国计量学院》2015年硕士论文

【摘要】：光栅尺作为位移传感器,已广泛应用于精密测量仪器中,随着对测量精度要求的不断提高,对光栅尺的质量也提出了更高的要求。光栅的刻划质量直接影响其产生的莫尔条纹信号质量,而栅距误差是评价光栅刻划质量的重要指标,因此精确测量光栅的栅距,对于提高光栅产品的质量具有重要意义。激光干涉比长仪是检定线纹尺的最高等别装置,主要针对刻线间距为0.1mm和1mm的标准线纹尺进行测量,而对于间距小于0.02mm的光栅类特殊线纹尺,难以实现直接测量。为了满足工业上对于光栅检测的需求,本文设计了基于高倍率双狭缝光电显微镜的测量系统,可直接应用在激光干涉比长仪上对微密刻线间距进行动态测量,从而实现了对光栅类特殊线纹尺线间距的检定。本文的主要研究内容有:(1)设计双光路刻线信号采集系统对光栅的刻线进行动态瞄准,应用光电倍增管实现对光栅微密刻线像的光电转换;(2)设计信号处理电路,对两路光电信号进行处理,提取刻线瞄准位置并输出脉冲信号进行指示;(3)搭建双频激光干涉测量系统对刻线间距进行测量;采用热电偶等传感器构建一套高精度温度、湿度、压力补偿系统,对空气折射率进行实时补偿,提高激光干涉仪测量精度;(4)搭建实验平台,对多种规格的光栅样板进行测量,验证瞄准读数系统的测量能力。
[Abstract]:As a displacement sensor, grating ruler has been widely used in precision measuring instruments. With the continuous improvement of measurement accuracy, the quality of grating ruler is also required to be higher. The marking quality of grating directly affects the quality of moire fringe signal produced by grating, and the raster distance error is an important index to evaluate the quality of grating marking. Therefore, it is important to accurately measure the grating spacing to improve the quality of grating products. The laser interferometer is the most advanced device for calibrating the linear ruler. It is mainly aimed at measuring the standard stripe ruler with 0.1mm and 1mm spacing, but it is difficult to realize the direct measurement for the special linear ruler of grating whose spacing is less than that of 0.02mm. In order to meet the demand of grating detection in industry, a measuring system based on high rate double slit photoelectric microscope is designed in this paper, which can be directly used in the dynamic measurement of the distance between micro-dense lines on the laser interferometer. Thus, the calibration of the special linear stripe distance between gratings is realized. The main research contents of this paper are as follows: (1) designing a double optical circuit signal acquisition system to dynamically aim the grating line, and using a photomultiplier tube to realize the photoelectric conversion of the grating microdense line image. (2) designing the signal processing circuit. Two optoelectronic signals are processed, the aiming position of the cutting line is extracted and the pulse signal is outputted to indicate the laser interference. A double frequency laser interferometry system is built to measure the distance between the lines, and a set of high precision temperature, humidity and humidity are constructed by using thermocouple and other sensors. The pressure compensation system, which compensates the refractive index of air in real time, improves the measuring precision of laser interferometer, sets up the experimental platform, measures the grating template of various specifications, and verifies the measuring ability of the aiming reading system.
【学位授予单位】：中国计量学院
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TH744.5

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