激光器波长测量装置研究

发布时间：2018-06-01 00:02

本文选题：激光器 + 波长测量　；参考：《华中科技大学》2015年硕士论文

【摘要】：激光干涉技术是重要的测量技术,广泛应用于尺寸、形位和表面形貌测量。在这些测量中,激光波长均作为测量基准,其稳定性、准确性对仪器的精度具有很大的影响。然而,由于环境条件和驱动电源波动的影响,激光器波长变化不可避免。因此,为保证仪器的测量精度和稳定性,激光器波长的实时测量校准是必要的。本文基于光栅衍射原理,开发一种激光器波长测量装置,主要研究内容与成果包括:1、研究分析了四象限光电探测器(QD)光斑中心定位原理,提出了基于光栅衍射原理结合双四象限光电探测器进行光斑中心定位的波长测量原理,设计了测量系统架构,构建了测量装置。2、设计了四象限光电探测器信号处理电路,包括探测器前置放大电路和光斑中心计算电路。其中,前置放大电路将光电单元电流信号转换为电压信号,光斑中心计算电路将四路电压信号转换为带有光斑中心信息的电压信号,通过PCI采集卡输入计算机进行处理。3、建立了均匀分布和高斯分布两种激光光斑模型,采用Matlab仿真,得到了四象限探测器在理论和实际情况下,不同光斑的中心定位偏移量曲线和误差曲线。根据仿真结果,分析了影响四象限光斑中心定位精度的一些因素,给出了误差补偿办法。在此基础上,完成了波长测量系统测量程序设计。4、对激光器波长测量装置进行了实验测试,包括系统的稳定性测试和重复性测试,并进行了误差分析。实验和分析结果反映了测量系统的有效性。
[Abstract]:Laser interferometry is an important measurement technique, which is widely used in measurement of dimension, configuration and surface morphology. In these measurements, the laser wavelength is used as the measurement datum, and its stability and accuracy have great influence on the accuracy of the instrument. However, the variation of laser wavelength is inevitable due to the environmental conditions and the fluctuation of driving power supply. Therefore, in order to ensure the accuracy and stability of the instrument, it is necessary to calibrate the laser wavelength in real time. Based on the principle of grating diffraction, a laser wavelength measuring device is developed in this paper. The main research contents and results include: 1. The principle of locating the spot center of a four-quadrant photodetector, QD), is studied and analyzed. The wavelength measurement principle based on grating diffraction principle and double four-quadrant photodetector is put forward, the measurement system architecture is designed, the measuring device is constructed, and the signal processing circuit of four-quadrant photodetector is designed. It includes detector preamplifier circuit and spot center calculation circuit. The preamplifier circuit converts the current signal of the photoelectric unit into the voltage signal, and the light spot center calculation circuit converts the four voltage signals into the voltage signal with the information of the spot center. Two kinds of laser spot models, uniform distribution and Gao Si distribution, are established by using PCI acquisition card input computer to process. The four-quadrant detector is obtained in theory and practice by Matlab simulation. The center location offset curve and error curve of different spot. Based on the simulation results, some factors affecting the accuracy of the four-quadrant optical spot location are analyzed, and the error compensation method is given. On this basis, the measurement program of the wavelength measurement system is designed. 4. The laser wavelength measuring device is tested experimentally, including the stability test and repeatability test of the system, and the error analysis is carried out. The experimental and analytical results reflect the effectiveness of the measurement system.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248

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