压电谐振式微质量测量系统

发布时间：2018-06-08 00:09

本文选题：压电晶体 + 谐振频率　；参考：《压电与声光》2017年05期

【摘要】：基于压电晶体的正、逆压电效应,对压电谐振器的构成原理及压电晶片谐振频率的质量敏感原理(Sauerbrey方程)进行了分析。基于Sauerbrey测量原理,设计了压电谐振式微质量测量系统,对该系统的设计方案进行了分析。为减小温度等环境因素对压电晶体检测性能的影响,系统采用两个相同的石英晶体振荡电路构成双谐振式的压电晶体振荡器。采用模块化设计思想,对该测量系统各模块进行了设计与实现,并对系统性能进行了测试。结果表明,当测量端加载的质量越大,系统测量出的谐振差频值则越大,实验结果与理论分析结果吻合较好。相对于线性的理论结果,该实验结果的非线性误差为5.5%。该系统实现了压电谐振频率的变化与被测微质量之间的变换,能够实现对微质量进行测量。
[Abstract]:Based on the direct and inverse piezoelectric effect of piezoelectric crystal, the principle of piezoelectric resonator and the mass-sensitive principle of piezoelectric wafer resonance frequency are analyzed. Based on Sauerbrey measurement principle, a piezoelectric resonant micro-mass measurement system is designed, and the design scheme of the system is analyzed. In order to reduce the influence of temperature and other environmental factors on the detection performance of piezoelectric crystals, two identical quartz crystal oscillating circuits are used to form a double resonant piezoelectric crystal oscillator. The modular design idea is adopted to design and implement each module of the measuring system, and the performance of the system is tested. The results show that the larger the loading mass is, the larger the resonance difference is, and the better agreement between the experimental results and the theoretical analysis results is obtained. Compared with the linear theoretical results, the nonlinear error of the experimental results is 5.5. The system realizes the transformation between the change of piezoelectric resonance frequency and the measured micro-mass, and can realize the measurement of micro-mass.
【作者单位】：南昌大学信息工程学院;
【基金】：江西省科技支撑计划基金资助项目(20141BBG70006) 江西省教育厅科技计划基金资助项目(GJJ14163)
【分类号】：TN384

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