基于外延剥离技术的薄膜LEDs的电流扩展和热效应研究

发布时间：2018-06-14 17:36

本文选题：薄膜LEDs + 电流扩展　；参考：《中国科学:物理学力学天文学》2016年04期

【摘要】：随着外延剥离技术和转印技术的发展,柔性无机半导体集成器件引起人们的广泛关注.柔性无机发光二级管(LED)的研制是高精度转印技术和应用于生物传感的柔性混合集成技术的迫切需求.薄膜发光二级管(TF-LEDs)的电流扩展和热管理是研制TF-LEDs性能的关键.该文采用光刻胶微支撑结构,制备了两种结构的TF-LEDs,并将其转印到柔性衬底聚二甲基硅氧烷(PDMS)上,测试TF-LEDs的电学特性.采用二维有限元模拟仿真,综合考虑复合机制、晶格温度等对LEDs电学特性的影响,分析了条形电极结构TF-LEDs和环形电极结构TF-LEDs的电流扩展问题,说明环形电极结构TF-LEDs电流分布均匀性好,自发热效应较小;在柔性衬底上,可以在相对较大的功率下连续工作而不会因为温度过高而造成器件损坏.
[Abstract]:With the development of epitaxial stripping technology and transfer printing technology, flexible inorganic semiconductor integrated devices have attracted wide attention. The development of flexible inorganic light-emitting secondary tube (LED) is an urgent need for high precision transfer printing technology and flexible hybrid integration technology for biosensors. The current spread and thermal management of thin film luminescent secondary transistor (TF-LEDs) are the key to the development of TF-LEDs. In this paper, two kinds of TF-LEDswere prepared by photolithographic micro-supporting structure, and were transferred to the flexible substrate polydimethylsiloxane (PDMS). The electrical properties of TF-LEDs were tested. By using two-dimensional finite element simulation and considering the effects of composite mechanism and lattice temperature on the electrical properties of LEDs, the current propagation of strip electrode structure TF-LEDs and annular electrode structure TF-LEDs is analyzed. The results show that the TF-LEDs have good uniformity of current distribution and small self-heating effect, and can work continuously on flexible substrates at relatively high power without causing damage to the devices due to excessive temperature.
【作者单位】：中国科学院半导体研究所纳米光电子实验室;四川大学电气信息学院自动化系;
【基金】：国家重点基础研究发展计划(编号:2015CB351902)资助项目
【分类号】：TN312.8

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