集成电路精密引线模具微细超声加工设备开发及实验研究

发布时间：2018-06-19 23:19

本文选题：集成电路 + 模具　；参考：《北京交通大学》2015年硕士论文

【摘要】：集成电路是电子信息产业的心脏,集成电路每1元的产值,可以带动GDP100元的产值,对国民经济的发展具有很高的贡献率。集成电路的发展离不开高质量的键合金丝,从而对有硬脆性材料制成的集成电路精密引线模具提出了越来越高的要求。超声加工技术是加工硬脆性材料的主要方法,在上述模具的制造过程中扮演着重要的角色。但集成电路精密引线模具孔径微小,目前尚没有成熟的具有在线监控功能的卧式超声加工设备。本文从这一角度出发,研发了集成电路精密引线模具卧式超声加工机床,主要工作内容为：1.选择介电损耗正切值尽可能小,材料的机械品质因数大的压电陶瓷元件,结合声学、电学、机械学设计结构合理,设计制造出专用的、高共振频率的、工作可靠的压电换能器。2.选取阶梯型变幅杆应用理论解析法进行分析,得出了变截面杆的振动方程。运用ANSYS软件对阶梯型变幅杆进行了模态分析和谐响应分析,针对谐响应分析中所存在的应力集中现象进行了结构优化和验证。3.在超声换能器、变幅杆研究的基础上,对专用的超声加工机床的设计制造进行研究,对机床的主体结构给予详细的分析和零件设计,最后经过计算与校核,设计制造一台具有在线检测功能、适用于集成电路精密引线模具的卧式超声加工机床。4.在超声加工实验结果及分析上采用正交实验方法设计了三因素三水平正交实验,考察了磨粒粒度、工件转速和磨料浓度三个参数对材料去除率的实际影响和作用规律。
[Abstract]:Integrated circuit is the heart of electronic information industry. The output value of integrated circuit every 1 yuan can drive the output value of GDP100 yuan, and it has a high contribution rate to the development of national economy. The development of integrated circuit can not be separated from the high quality bond alloy wire, so the precision lead mould made of hard and brittle material is demanded more and more. Ultrasonic machining technology is the main method of processing hard brittle materials and plays an important role in the manufacturing process of the above die. However, the aperture of IC precision lead die is small, so there is no mature horizontal ultrasonic machining equipment with on-line monitoring function. From this point of view, a horizontal ultrasonic machining machine for precision lead die of integrated circuit is developed in this paper. The main work is: 1: 1. The piezoelectric ceramic elements with low dielectric loss tangent value and high mechanical quality factor are selected. The piezoelectric transducer with high resonance frequency and reliable working is designed and manufactured with reasonable design structure of acoustics, electricity and mechanics. The vibration equation of variable cross section bar is obtained by using theoretical analysis method. The modal analysis and harmonic response analysis of stepped horn are carried out by using ANSYS software. The stress concentration phenomenon in harmonic response analysis is optimized and verified. Based on the research of ultrasonic transducer and amplitude change pole, the design and manufacture of the special ultrasonic machining machine tool are studied. The main structure of the machine tool is analyzed in detail and the parts are designed. Design and manufacture a horizontal ultrasonic machining machine tool. 4. Based on the experimental results and analysis of ultrasonic machining, a three-factor and three-level orthogonal experiment was designed by orthogonal experimental method. The effects of three parameters, such as particle size, workpiece speed and abrasive concentration, on the material removal rate were investigated.
【学位授予单位】：北京交通大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN405

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