基于FPGA的BiSS-C协议编码器接口技术研究及解码实现

发布时间：2018-06-21 14:14

  本文选题：BiSS-C + FPGA　； 参考：《液晶与显示》2016年04期

【摘要】：为了满足光刻机工件台超精密运动控制系统对位移测量的需求,本文提出了基于FPGA的BiSS-C协议解码方法,并针对该方法进行了电路设计以及实验验证。首先,研究了BiSS-C协议内容,就其组网方式和帧格式做了详细的介绍。然后,针对绝对式编码器解码要求,利用FPGA拓展性好、灵活性高等特点,通过状态机,设计了绝对式编码器的数据传输电路,实现了BiSS-C协议的译码功能,并采用CLE-AA容栅尺进行了应用验证。最后,进行了与增量式光栅尺的对比校准实验。实验表明,容栅尺绝对式编码器可实现10kHz的传输速率,运动误差在±5μm之内,其可靠性与准确性满足超精密运动控制系统的粗定位要求。
[Abstract]:In order to meet the requirement of displacement measurement in ultra-precision motion control system of lithographic workpiece, this paper presents a decoding method of BiSS-C protocol based on FPGA, and designs the circuit and verifies the method by experiment. Firstly, the content of BiSS-C protocol is studied, and its networking mode and frame format are introduced in detail. Then, according to the decoding requirements of absolute encoder, the decoding function of BiSS-C protocol is realized by using the characteristics of FPGA, such as good expansibility and high flexibility, and the data transmission circuit of absolute encoder is designed by state machine. The application of CLE-AA capacitive grating ruler is verified. Finally, the contrast calibration experiment with the incremental grating ruler is carried out. The experimental results show that the absolute encoder can achieve the transmission rate of 10kHz, the motion error is within 卤5 渭 m, and its reliability and accuracy meet the requirements of coarse positioning of ultra-precision motion control system.
【作者单位】： 清华大学机械工程系;
【基金】：国家自然科学基金(No.51475261)~~
【分类号】：TN762
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本文编号：2048976