硅基GaN谐振光栅及其传感应用

发布时间：2018-07-14 21:16

【摘要】：随着微纳米加工工艺的快速进步,制备纳米结构器件已经成为了现实。近年来,基于Ga N材料的谐振光栅器件成为了研究的热点之一。GaN是一种直接带隙半导体,有着优秀的压电性能和良好的光电性能。它对温度和辐射均具有很好的忍耐性,且对许多具有腐蚀性的化学物质均不敏感。基于以上的这些特性,GaN光栅非常有希望运用于制造传感器件和多传感平台,尤其运用于传统传感器件不能正常工作的恶劣环境中。本文基于RSOFT软件对悬空谐振光栅的参数进行计算,并根据计算的结果对光栅的结构和尺寸进行了优化。该软件主要基于严格耦合波理论(RCWA)。本文描述了GaN悬空薄膜光栅,该谐振GaN光栅是在硅基GaN平面上制作的。该器件GaN层底部的硅衬底材料被完全刻蚀去除,从而实现完全悬空的GaN薄膜光栅。因此,悬空GaN光栅上下就会完全被低折射率的空气所包围,满足全反射条件,光会被限制在光栅层内,当相位匹配时可产生显著的谐振效应。同时,去除硅衬底还可以防止因为衬底而导致的额外光学损耗。并且还采用了背后减薄工艺,对GaN薄膜的厚度进行减薄,这使得该悬空器件具有低损耗、高反射率、谐振性能优异等特性。同时,该器件的谐振特性对介质环境的折射率非常敏感,因此能够以该光栅为模板,来设计工作在可见光波段、适用于各种环境的折射率传感器。本文采用了角分辨微反射系统对器件进行测试,测试结果与模拟的结果完全一致。
[Abstract]:With the rapid progress of micro and nanoscale processing technology, preparation of nanostructure devices has become a reality. In recent years, resonant grating devices based on Ga N materials have become one of the hotspots of research..GaN is a kind of direct band gap semiconductor with excellent piezoelectricity and good photoelectric energy. It has good tolerance to both temperature and radiation. It is not sensitive to many corrosive chemicals. Based on these characteristics, GaN gratings are very promising to be used in the manufacture of sensors and multi sensing platforms, especially in bad environments where traditional sensors are not working normally. Based on RSOFT soft parts, the parameters of the suspended resonant grating are calculated and the root is used in this paper. The structure and size of the grating are optimized according to the calculated results. The software is mainly based on the strict coupled wave theory (RCWA). This paper describes the GaN suspended film grating, which is made on the silicon based GaN plane. The silicon substrate material at the bottom of the GaN layer is completely etched out to realize the completely suspended GaN thin film light. As a result, the suspended GaN grating is completely surrounded by low refractive index air and satisfies full reflection conditions. Light will be confined to the grating layer. When the phase matching is matched, a significant resonance effect can be produced. At the same time, the removal of the silicon substrate can also prevent the optical loss due to the substrate. And the process of the backdrop is also used. The thickness of GaN thin film is thinned, which makes the suspension device have the characteristics of low loss, high reflectivity and excellent resonance performance. At the same time, the resonance characteristic of the device is very sensitive to the refractive index of the medium environment. Therefore, the grating can be used as a template to design the refractive index sensor for various environments in the visible light band. The angular resolution micro reflection system is used to test the device. The test results are in good agreement with the simulation results.
【学位授予单位】：南京邮电大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN304.2;TP212

【相似文献】