CCD紫外增强薄膜旋涂法工艺优化
发布时间：2018-07-16 07:40
【摘要】：在硅基探测器的入射窗上制备荧光下转换薄膜,是一种有效降低成本的紫外荧光增强技术。从理论上探讨了由聚二甲基硅氧烷与颜料黄101混合胶体的紫外荧光薄膜旋涂工艺参数与性能之间关系,搭建紫外荧光薄膜应用于光谱分析的性能测试实验平台,对紫外荧光增强薄膜旋涂工艺参数质量配比、旋涂转速进行优化。光谱分析探测器有两个主要指标,光谱响应灵敏度和光谱分辨率,分析与实验结果表明,利用旋涂法制备紫外增强荧光薄膜,旋涂转速将直接影响薄膜的厚度、表面粗糙度和荧光物质的分布,从而影响光谱分析系统的分辨率;紫外荧光增强薄膜的增强效率与荧光溶剂聚二甲基硅氧烷与荧光物质颜料黄101的质量比密切相关,质量比低无法满足对紫外响应效率的提高,但高质量比,荧光物质处在聚集态荧光自猝灭严重,也不利于增强薄膜的紫外响应效率。最终,在薄膜旋涂工艺优化的基础上,旋涂转速2 500~3 000r·min~(-1),荧光物质与荧光溶剂质量比为7∶100制备出紫外荧光增强薄膜。汞灯特征光谱测试结果表明该薄膜313nm紫外波长处探测响应灵敏度提高了1.6倍左右,对比分析镀膜前后特征光谱的半波带宽,镀制紫外增强荧光薄膜对其影响很小。
[Abstract]:It is an effective technology to reduce the cost of UV fluorescence enhancement by preparing fluorescence downconversion thin films on the incident window of silicon based detectors. The relationship between the process parameters and the properties of the UV fluorescent thin film, which is mixed with polydimethylsiloxane and pigment yellow 101, is discussed theoretically, and the experimental platform for testing the performance of the ultraviolet fluorescent film used in spectral analysis is built. The mass ratio and rotation speed of UV fluorescence enhanced film spin-coating process parameters were optimized. Spectral analysis detector has two main indexes, spectral response sensitivity and spectral resolution. The results of analysis and experiment show that the rotational speed of spin coating will directly affect the thickness of ultraviolet enhanced fluorescence film. The surface roughness and the distribution of fluorescent substances affect the resolution of the spectral analysis system, and the enhancement efficiency of the UV-enhanced film is closely related to the mass ratio of the fluorescent solvent polydimethylsiloxane to the fluorescent pigment yellow 101. The low mass ratio can not satisfy the improvement of the UV response efficiency, but the high mass ratio, the fluorescence substance in the aggregation state fluorescence self-quenching is serious, also is not conducive to enhance the UV response efficiency of the film. Finally, on the basis of the optimization of the spin-coating process, UV enhanced fluorescence films were prepared by the spin coating rotation speed of 2 500 ~ (3 000) r / min ~ (-1) and the mass ratio of fluorescent substance to fluorescent solvent at 7: 100. The measured results of the characteristic spectrum of mercury lamp show that the detection sensitivity at the UV wavelength of the film is about 1.6 times higher. Compared with the half-wave bandwidth of the characteristic spectrum before and after the deposition, the UV enhanced fluorescence film has little effect on it.
【作者单位】： 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;长春理工大学光电工程学院;
【基金】：国家(863)计划项目(2015AA042402) 吉林省自然科学基金项目(20160101272JC) 吉林省科技发展计划项目(20140201011GX) 国家自然科学基金青年基金项目(61504143)资助
【分类号】：TN23
本文编号：2125703
[Abstract]:It is an effective technology to reduce the cost of UV fluorescence enhancement by preparing fluorescence downconversion thin films on the incident window of silicon based detectors. The relationship between the process parameters and the properties of the UV fluorescent thin film, which is mixed with polydimethylsiloxane and pigment yellow 101, is discussed theoretically, and the experimental platform for testing the performance of the ultraviolet fluorescent film used in spectral analysis is built. The mass ratio and rotation speed of UV fluorescence enhanced film spin-coating process parameters were optimized. Spectral analysis detector has two main indexes, spectral response sensitivity and spectral resolution. The results of analysis and experiment show that the rotational speed of spin coating will directly affect the thickness of ultraviolet enhanced fluorescence film. The surface roughness and the distribution of fluorescent substances affect the resolution of the spectral analysis system, and the enhancement efficiency of the UV-enhanced film is closely related to the mass ratio of the fluorescent solvent polydimethylsiloxane to the fluorescent pigment yellow 101. The low mass ratio can not satisfy the improvement of the UV response efficiency, but the high mass ratio, the fluorescence substance in the aggregation state fluorescence self-quenching is serious, also is not conducive to enhance the UV response efficiency of the film. Finally, on the basis of the optimization of the spin-coating process, UV enhanced fluorescence films were prepared by the spin coating rotation speed of 2 500 ~ (3 000) r / min ~ (-1) and the mass ratio of fluorescent substance to fluorescent solvent at 7: 100. The measured results of the characteristic spectrum of mercury lamp show that the detection sensitivity at the UV wavelength of the film is about 1.6 times higher. Compared with the half-wave bandwidth of the characteristic spectrum before and after the deposition, the UV enhanced fluorescence film has little effect on it.
【作者单位】： 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室;长春理工大学光电工程学院;
【基金】：国家(863)计划项目(2015AA042402) 吉林省自然科学基金项目(20160101272JC) 吉林省科技发展计划项目(20140201011GX) 国家自然科学基金青年基金项目(61504143)资助
【分类号】：TN23
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