基于声表面波气体检测器件特性的研究
发布时间：2018-08-01 16:49
【摘要】：相比于传统的气体检测器件,SAW器件具有精度高、体积小、功耗低、适合远距离传输等特点。影响声表面波器件检测性能的主要因素有压电材料的种类、切向及波传播方向的选取,叉指换能器的设计,以及敏感膜材料的确定等,本文主要从以上三个方面对SAW器件展开研究。通过对压电材料的SAW波速和机电耦合系数的分析,确定压电材料的种类和切向。本文利用有限元仿真软件COMSOL Multiphysics 5.0对该材料中SAW传播的过程进行了正反模态的研究,给出最后的仿真结果。对叉指换能器的研究中,给出了影响叉指换能器性能的主要因素,讨论了电极二次效应的影响,设计了一种性能较好的叉指换能器,并给出相应的有限元仿真模型。在铌酸锂压电晶体表面设计制作了线宽为5μm和10μm的SAW器件,给出具体的工艺过程。并利用磁控溅射技术在SAW器件的敏感区形成氧化锌气体敏感膜,并用X射线衍射仪和扫描电镜对所制备的敏感膜进行了测试,并建立了两种类型的SAW气体检测器件的有限元仿真模型,最后成功制备了延迟线型SAW二氧化氮气体检测器件。
[Abstract]:Compared with conventional gas detection devices, saw devices have the advantages of high accuracy, small size, low power consumption and suitable for long-distance transmission. The main factors affecting the performance of saw devices are the types of piezoelectric materials, the selection of tangential and wave propagation directions, the design of cross finger transducers, and the determination of sensitive film materials, etc. In this paper, SAW devices are studied from the above three aspects. Through the analysis of SAW wave velocity and electromechanical coupling coefficient of piezoelectric materials, the type and tangential direction of piezoelectric materials are determined. In this paper, the forward and negative modes of SAW propagation in the material are studied by using the finite element simulation software COMSOL Multiphysics 5.0, and the final simulation results are given. In the research of interDigital transducer, the main factors affecting the performance of the interDigital transducer are given, the influence of the secondary effect of electrode is discussed, a better performance interDigital transducer is designed, and the corresponding finite element simulation model is given. SAW devices with line widths of 5 渭 m and 10 渭 m were designed and fabricated on the surface of lithium niobate piezoelectric crystal. Zinc oxide gas sensing film was formed by magnetron sputtering technique in the sensitive region of SAW device. The sensitive film was tested by X-ray diffraction and scanning electron microscope. The finite element simulation models of two types of SAW gas detection devices are established. Finally, the delay line SAW nitrogen dioxide gas detection devices are successfully fabricated.
【学位授予单位】：黑龙江大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN65
[Abstract]:Compared with conventional gas detection devices, saw devices have the advantages of high accuracy, small size, low power consumption and suitable for long-distance transmission. The main factors affecting the performance of saw devices are the types of piezoelectric materials, the selection of tangential and wave propagation directions, the design of cross finger transducers, and the determination of sensitive film materials, etc. In this paper, SAW devices are studied from the above three aspects. Through the analysis of SAW wave velocity and electromechanical coupling coefficient of piezoelectric materials, the type and tangential direction of piezoelectric materials are determined. In this paper, the forward and negative modes of SAW propagation in the material are studied by using the finite element simulation software COMSOL Multiphysics 5.0, and the final simulation results are given. In the research of interDigital transducer, the main factors affecting the performance of the interDigital transducer are given, the influence of the secondary effect of electrode is discussed, a better performance interDigital transducer is designed, and the corresponding finite element simulation model is given. SAW devices with line widths of 5 渭 m and 10 渭 m were designed and fabricated on the surface of lithium niobate piezoelectric crystal. Zinc oxide gas sensing film was formed by magnetron sputtering technique in the sensitive region of SAW device. The sensitive film was tested by X-ray diffraction and scanning electron microscope. The finite element simulation models of two types of SAW gas detection devices are established. Finally, the delay line SAW nitrogen dioxide gas detection devices are successfully fabricated.
【学位授予单位】：黑龙江大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN65
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