PMMA布拉格光栅基板的飞切仿真及实验研究
发布时间：2018-08-01 17:35
【摘要】：分布反馈染料激光器基板上的高精度微米级(通常为10μm以下)布拉格光栅是实现激光波长调谐和保证激光输出质量的关键。布拉格光栅是线性三维周期微沟槽阵列,通常采用MEMS技术和能量辅助技术加工。但是上述技术普遍存在加工精度低、被加工材料单一、加工成本高、生产周期长等问题,从而限制了激光输出效率和质量的提高。结合实际需要和加工条件,本课题使用金刚石飞刀切削技术在PMMA(有机玻璃)基板加工布拉格光栅,借助数值模拟、基础实验类比、有限元仿真和工艺实验验证相结合的方法,研究PMMA基板的力学特性和加工性能,类比地分析飞刀切削过程中的切屑流动过程对加工质量的影响,预测各加工参数对飞刀切削过程中切屑流动性好坏、应力应变的影响规律,采用声发射技术完成亚微米级精度对刀,通过单因素试验验证理论与仿真的预测结果,优化工艺参数。这些工作对最终在PMMA基板上获得高质量布拉格光栅具有重要的理论借鉴意义和实际应用价值。本文通过显微压痕试验测量出材料维氏硬度和压痕形貌,并研究材料在微米级去除量下的弹塑性表现。结合纳米压痕试验计算材料基本力学性能参数,模拟材料的应力-应变曲线,为仿真试验做准备。采用超精密车削获得高质量的PMMA工件端面,借助微刨削实验与飞刀切削实验过程、结果的类比,深入了解飞刀切削布拉格光栅的优势和劣势。并结合飞刀切削力公式分析影响切削质量的因素,得出:刀尖前刀面非自由切屑区域内切屑流动性对加工质量具有重要影响。应用有限元仿真方法,根据实际加工过程,建立三维刀具、工件切削模型,用grooving模式对刀尖前刀面非自由切屑区域内的切削过程进行简化仿真,同时结合压痕试验结果选择软件自带本构模型并完成各项参数的设置。研究了背吃刀量、切削速度和刀尖夹角对切削过程中切屑流动性、应力、应变的影响。搭建实验平台,创新地采用声发射技术完成飞刀切削亚微米级精度对刀,并应用声发射系统分析飞刀切削状态;通过单因素工艺试验结果对比,研究并验证各因素对加工质量的影响规律,在此基础上,优化工艺参数,获得高质量的布拉格光栅。
[Abstract]:The high precision micrometer Bragg grating (usually less than 10 渭 m) on the substrate of distributed feedback dye laser is the key to realize the wavelength tuning and ensure the laser output quality. Bragg grating (FBG) is a linear three-dimensional periodic microgroove array, which is usually machined by MEMS and energy-assisted technology. However, the problems such as low machining precision, single processed material, high processing cost and long production cycle limit the improvement of laser output efficiency and quality. According to the practical needs and processing conditions, this paper uses the diamond flying knife cutting technology to process the Bragg grating on the PMMA substrate, and combines the numerical simulation, the basic experimental analogy, the finite element simulation and the technological experiment to verify the FBG. The mechanical properties and machining properties of PMMA substrate are studied. The influence of chip flow process on machining quality is analyzed by analogy, and the influence of processing parameters on chip fluidity and stress strain during flying knife cutting is predicted. The submicron precision tool is realized by acoustic emission technology. The prediction results of theory and simulation are verified by single factor test, and the process parameters are optimized. These works have important theoretical reference significance and practical application value for obtaining high quality Bragg grating on PMMA substrate. In this paper, the Vickers hardness and indentation morphology were measured by microindentation test, and the elastoplastic behavior of the materials at micron removal was studied. Combined with nano-indentation test to calculate the basic mechanical properties of the material and simulate the stress-strain curve of the material to prepare for the simulation test. The end face of PMMA workpiece with high quality is obtained by ultra-precision turning. The advantages and disadvantages of Flying knife cutting Bragg grating are deeply understood by means of the experiment of micro-planing and the experimental process of flying knife cutting. Combined with the cutting force formula of flying knife, the factors affecting cutting quality are analyzed. It is concluded that chip fluidity in the non-free chip area of the front cutting face of the cutter has an important effect on the machining quality. Using finite element simulation method, according to the actual machining process, the cutting model of 3D tool and workpiece is established, and the cutting process in the non-free chip area of the front cutter face of the cutter tip is simplified by using grooving mode. At the same time, combined with the indentation test results, the constitutive model of the software was selected and the parameters were set up. The effects of cutting speed, cutting speed and angle on chip fluidity, stress and strain during cutting are studied. The experiment platform was set up, and the cutting precision alignment of submicron was accomplished by using acoustic emission technology, and the cutting state of flying knife was analyzed by acoustic emission system, and the results of single factor process test were compared. The influence of various factors on machining quality is studied and verified. On the basis of this, the process parameters are optimized to obtain high quality Bragg gratings.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248
本文编号：2158326
[Abstract]:The high precision micrometer Bragg grating (usually less than 10 渭 m) on the substrate of distributed feedback dye laser is the key to realize the wavelength tuning and ensure the laser output quality. Bragg grating (FBG) is a linear three-dimensional periodic microgroove array, which is usually machined by MEMS and energy-assisted technology. However, the problems such as low machining precision, single processed material, high processing cost and long production cycle limit the improvement of laser output efficiency and quality. According to the practical needs and processing conditions, this paper uses the diamond flying knife cutting technology to process the Bragg grating on the PMMA substrate, and combines the numerical simulation, the basic experimental analogy, the finite element simulation and the technological experiment to verify the FBG. The mechanical properties and machining properties of PMMA substrate are studied. The influence of chip flow process on machining quality is analyzed by analogy, and the influence of processing parameters on chip fluidity and stress strain during flying knife cutting is predicted. The submicron precision tool is realized by acoustic emission technology. The prediction results of theory and simulation are verified by single factor test, and the process parameters are optimized. These works have important theoretical reference significance and practical application value for obtaining high quality Bragg grating on PMMA substrate. In this paper, the Vickers hardness and indentation morphology were measured by microindentation test, and the elastoplastic behavior of the materials at micron removal was studied. Combined with nano-indentation test to calculate the basic mechanical properties of the material and simulate the stress-strain curve of the material to prepare for the simulation test. The end face of PMMA workpiece with high quality is obtained by ultra-precision turning. The advantages and disadvantages of Flying knife cutting Bragg grating are deeply understood by means of the experiment of micro-planing and the experimental process of flying knife cutting. Combined with the cutting force formula of flying knife, the factors affecting cutting quality are analyzed. It is concluded that chip fluidity in the non-free chip area of the front cutting face of the cutter has an important effect on the machining quality. Using finite element simulation method, according to the actual machining process, the cutting model of 3D tool and workpiece is established, and the cutting process in the non-free chip area of the front cutter face of the cutter tip is simplified by using grooving mode. At the same time, combined with the indentation test results, the constitutive model of the software was selected and the parameters were set up. The effects of cutting speed, cutting speed and angle on chip fluidity, stress and strain during cutting are studied. The experiment platform was set up, and the cutting precision alignment of submicron was accomplished by using acoustic emission technology, and the cutting state of flying knife was analyzed by acoustic emission system, and the results of single factor process test were compared. The influence of various factors on machining quality is studied and verified. On the basis of this, the process parameters are optimized to obtain high quality Bragg gratings.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248
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