内腔亚波长光栅MEMS VCSELs的波长调谐范围

发布时间：2018-08-07 06:34

【摘要】：微机电系统(MEMS)垂直腔面发射激光器(VCSELs)是一种特殊光源,具有低功耗、高调制速率、宽波长调谐范围、易耦合等优点,被广泛应用于激光通信领域。为提升激光器工作性能,如扩大波长调谐范围、提高偏振对比度等,需要优化内腔亚波长光栅结构参数来改善腔内光场分布以及偏振输出模式。基于等效介质理论(EMT),并结合薄膜理论设计了针对调谐范围中心波长为850nm、GaAs材料的亚波长光栅的较优周期、占空比、脊高的取值。分析了横电(TE)、横磁(TM)光,占空比与脊高对光栅透射率的影响。另外,通过系统模拟,对比了未刻蚀光栅、光栅未优化及光栅优化后的激光器波长调谐范围,结果表明:针对特定波长调谐范围及光栅材料,通过优化光栅参数可实现光栅对TE或TM光的增透,增强半导体腔和空气隙之间光场的耦合,进而扩大激光器的波长调谐范围。
[Abstract]:(MEMS) vertical cavity surface emitting laser (VCSELs) in MEMS is a special light source, which has the advantages of low power consumption, high modulation rate, wide wavelength tuning range and easy coupling. It is widely used in the field of laser communication. In order to improve the performance of the laser, such as enlarging the wavelength tuning range and increasing the polarization contrast, it is necessary to optimize the structure parameters of the subwavelength grating in the cavity to improve the optical field distribution and the polarization output mode in the cavity. Based on the equivalent dielectric theory (EMT),) and the thin film theory, the optimal period, duty cycle and ridge height of the subwavelength grating with tuning range of 850 nm are designed. The effects of transverse (TE), transverse magnetic (TM) light, duty cycle and ridge height on the transmittance of the grating are analyzed. In addition, through systematic simulation, the wavelength tuning range of the laser with unetched grating, unoptimized grating and optimized grating is compared. The results show that: for specific wavelength tuning range and grating material, By optimizing the grating parameters, the grating can enhance the optical field coupling between the semiconductor cavity and the air gap, and then enlarge the wavelength tuning range of the laser.
【作者单位】：长春理工大学高功率半导体激光国家重点实验室;北京工业大学光电子技术省部共建教育部重点实验室;
【基金】：国家自然科学基金(60908012,61575008) 吉林省科技计划重点项目(201502040689x)
【分类号】：TN248

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