193nm激光制作的珐珀加速度传感器
发布时间：2018-09-07 11:21
【摘要】：加速度传感器是一种重要的传感器,在航空航天、地质勘探、土木结构振动测量等领域有着广阔的应用前景。而光纤珐珀传感器具有抗电磁干扰能力强、不易腐蚀、尺寸小、灵敏度高等优点。本文以激光制作的珐珀应变传感器为基础,设计并实现了一种光纤珐珀加速度传感器,满足在航空结构的振动检测及控制和大型旋转设备的振动监测等方面的需求。本文研究了193nm激光微加工制作的单珐珀空气腔的制作工艺,研制出了单腔和双腔珐珀传感器,并测试了它们的传感特性,结果表明:单珐珀空气腔的温度敏感系数为1.1°pm C,静态应变灵敏度为1.61 pm/με,双腔结构珐珀腔的温度敏感系数为9.7°pm C。在成功制作出的单珐珀空气腔的基础上,提出了一种基于双端固支梁结构的光纤珐珀加速度传感器设计方案。从结构力学的角度,理论研究了双端固支梁结构的力学特性。通过ANSYS软件对双端固支梁结构进行模态分析和静态分析,模拟分析了敏感质量块重心位置对固有频率的影响,也分析了结构在不同方向的应变分布和谐振特性。最后对光纤珐珀传感头和双端固支梁进行封装,制作出了一种对温度不敏感、可应用于低频加速度测量的加速度计,测量范围为?8?8 g。实验测得该加速度计的灵敏度为0.13 rad/g,测量频率为0 70 Hz,最小可探测的加速度为8 mg。以上研究工作证实了以这种具有优异应变特性和低温度敏感特性的传感器,可以封装制作成能测量其他参量的传感器。
[Abstract]:Acceleration sensor is an important sensor, which has a broad application prospect in aerospace, geological exploration, civil structure vibration measurement and other fields. The fiber-optic Fabry-Perot sensor has the advantages of high resistance to electromagnetic interference, low size and high sensitivity. Based on the Fabry-Perot strain sensor fabricated by laser, a fiber-optic Fabry-Perot acceleration sensor is designed and implemented to meet the needs of vibration detection and control of aeronautical structures and vibration monitoring of large rotating equipment. In this paper, the fabrication process of single Fabry-Perot air cavity fabricated by 193nm laser micromachining has been studied. The single cavity and double cavity Fabry-Perot sensors have been developed, and their sensing characteristics have been tested. The results show that the temperature sensitivity coefficient is 1.1 掳pm C, the static strain sensitivity is 1.61 pm/ 渭 蔚, and the temperature sensitivity coefficient is 9.7 掳pm C. Based on the successful fabrication of a single Fabry-Perot air chamber, a design scheme of a fiber-optic Fabry-Perot acceleration sensor based on a dual-end fixed beam structure is proposed. From the point of view of structural mechanics, the mechanical properties of two-end fixed beam structures are studied theoretically. The influence of the center of gravity of the sensitive mass block on the natural frequency and the strain distribution and resonance characteristics of the structure in different directions are simulated and analyzed by using ANSYS software for the modal analysis and static analysis of the double-end fixed beam structure. Finally, a kind of accelerometer, which is not sensitive to temperature and can be used in low frequency acceleration measurement, is fabricated by encapsulating the fiber-optic Fabry-Perot sensor head and the double-end clamping beam. The measuring range is 8g. The sensitivity of the accelerometer is 0. 13 rad/g,. The minimum detectable acceleration is 0. 70 Hz,. The minimum detectable acceleration is 8 mg.. It is proved that this kind of sensor with excellent strain characteristics and low temperature sensitivity can be packaged and fabricated to measure other parameters.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249;TP212
本文编号：2228112
[Abstract]:Acceleration sensor is an important sensor, which has a broad application prospect in aerospace, geological exploration, civil structure vibration measurement and other fields. The fiber-optic Fabry-Perot sensor has the advantages of high resistance to electromagnetic interference, low size and high sensitivity. Based on the Fabry-Perot strain sensor fabricated by laser, a fiber-optic Fabry-Perot acceleration sensor is designed and implemented to meet the needs of vibration detection and control of aeronautical structures and vibration monitoring of large rotating equipment. In this paper, the fabrication process of single Fabry-Perot air cavity fabricated by 193nm laser micromachining has been studied. The single cavity and double cavity Fabry-Perot sensors have been developed, and their sensing characteristics have been tested. The results show that the temperature sensitivity coefficient is 1.1 掳pm C, the static strain sensitivity is 1.61 pm/ 渭 蔚, and the temperature sensitivity coefficient is 9.7 掳pm C. Based on the successful fabrication of a single Fabry-Perot air chamber, a design scheme of a fiber-optic Fabry-Perot acceleration sensor based on a dual-end fixed beam structure is proposed. From the point of view of structural mechanics, the mechanical properties of two-end fixed beam structures are studied theoretically. The influence of the center of gravity of the sensitive mass block on the natural frequency and the strain distribution and resonance characteristics of the structure in different directions are simulated and analyzed by using ANSYS software for the modal analysis and static analysis of the double-end fixed beam structure. Finally, a kind of accelerometer, which is not sensitive to temperature and can be used in low frequency acceleration measurement, is fabricated by encapsulating the fiber-optic Fabry-Perot sensor head and the double-end clamping beam. The measuring range is 8g. The sensitivity of the accelerometer is 0. 13 rad/g,. The minimum detectable acceleration is 0. 70 Hz,. The minimum detectable acceleration is 8 mg.. It is proved that this kind of sensor with excellent strain characteristics and low temperature sensitivity can be packaged and fabricated to measure other parameters.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN249;TP212
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