多头式平面LED固晶机结构设计
发布时间：2018-09-09 08:45
【摘要】：针对目前市面上的固晶机都是单吸嘴结构,本文设计了一款多吸嘴的焊头机构的固晶机,具有连续取晶、固晶的特点,比单吸嘴固晶机在速度和精度方面有优势。采用虚拟样机技术和有限元技术对设计的机构进行分析,其结果满足固晶工艺要求,该设计方案具有一定的理论意义和实际应用价值。本文设计的固晶机主要由七大机构组成,七大机构分别是：多吸嘴焊头机构、点胶机构、顶针机构、X-Y支架工作台、晶圆供送机构、光学镜筒及照明机构和机架及其附属机构。本论文主要完成以下几方面的工作：(1)多吸嘴焊头机构的设计分析了焊头机构的工作原理,包括：光电传感器式检测漏晶或吸嘴堵塞、电磁阀控制真空和吹气完取成晶固晶、弹簧缓冲实现吸嘴“软着路”等。设计的多吸嘴焊头机构提供两种工作模式,模式一：采用8吸嘴结构,焊头机构每一工步都能完成取晶和固晶；模式二：采用4吸嘴、4点胶头的结构,焊头机构能分两工步完成取胶、点胶、取晶和固晶。本文详细介绍了模式一的工作过程,并设计了相应的8吸嘴焊头机构。8吸嘴焊头机构中,焊头机构的旋转运动部件采用DDR (Direct Drive Rotation)直驱电机驱动,利用直驱电机具有高重复定位精度、高加速度、免维护等特点,能大大提高焊头机构的性能；焊头机构的Z向运动部件采用高精度微型LM滚动导轨,在满足精度的前提下尽量减轻Z向运动机构的质量,提高Z向运动响应性；焊头机构的电气回转接口部件采用了气电混合旋转接头,有效解决了连续转动导致电气线路和气管缠绕的问题。(2)其他部分机构的设计其他部分机构包括：X-Y支架工作台、顶针机构、晶圆供送机构、点胶机构、CCD (Charge coupled Device)光学镜头及调节机构和机架等零部件。本文主要介绍了X-Y支架工作台、顶针机构、晶圆供送机构的工作原理及结构设计。X-Y支架工作台采用伺服电机驱动,滚珠丝杠副传动,并利用线性导轨滑块完成承载和导向。支架载物台还具有调节高度,可以适应不同规格的LED支架。该机构具有快速响应,高精度、通用的特点。顶针机构采用偏心轮机构和精密V型导轨副相结合的机构,由步进电机通过联轴器直接驱动,结构简单、成本较低,可以满足刺晶需求。晶圆供送机构的下部分为串联的X-Y工作台,可以实现位置的精密微调,其上部分为悬臂结构的晶圆环座,用于放置并固定晶圆。(3)焊头机构的仿真分析本文综合运用CAD\CAE集成环境,对平面LED多吸嘴固晶机进行了较为系统的设计分析和研究。使用三维设计软件SolidWorks2013对样机进行了三维建模和虚拟装配；结合有限元分析软件ANSYS14.0对焊头机构的关键零件进行模态分析,确定其固有频率和振型。建立柔性体,最后使用机械系统动力学仿真分析软件ADAMS2012对多吸嘴焊头机构进行了仿真分析,得出吸嘴在取晶位和固晶位置的接触力,由此来验证机构是否满足设计要求。
[Abstract]:In view of the single-suction-nozzle structure of the current crystal-fixing machine on the market, this paper designs a multi-suction-nozzle solidifying machine for welding head mechanism, which has the characteristics of continuous crystallization and solidification, and has advantages over single-suction-nozzle solidifying machine in speed and precision. The design scheme has certain theoretical significance and practical application value. The crystal fixer designed in this paper is mainly composed of seven mechanisms: multi-suction welding head mechanism, dispensing mechanism, thimble mechanism, X-Y support workbench, wafer feeding mechanism, optical lens barrel and lighting mechanism, frame and its subsidiary mechanism. The main work of this paper is as follows: (1) The design and analysis of multi-nozzle welding head mechanism work principle, including: photoelectric sensor type detection of crystal leakage or nozzle blockage, solenoid valve control of vacuum and blowing complete crystallization, spring buffer to achieve the suction nozzle "soft path" and so on. There are two working modes, one is using 8 suction nozzles structure, each step of the welding head mechanism can complete crystallization and solidification; the other is using 4 suction nozzles, 4 point head structure, the welding head mechanism can complete glue extraction, dispensing, crystallization and solidification in two steps. In structure.8 suction nozzle welding head mechanism, the rotating moving parts of the welding head mechanism are driven by DDR (Direct Drive Rotation) direct drive motor, which has the characteristics of high repetitive positioning accuracy, high acceleration and maintenance-free, and can greatly improve the performance of the welding head mechanism; the Z-direction moving parts of the welding head mechanism adopt high-precision micro LM rolling guide rail. On the premise of satisfying the precision, the quality of Z-direction motion mechanism is reduced as far as possible, and the Z-direction motion responsiveness is improved. The electric rotary joint of welding head mechanism adopts the pneumatic-electric hybrid rotary joint, which effectively solves the problem of winding of electric circuit and trachea caused by continuous rotation. (2) Other parts of mechanism design include: X-Y bracket. Workbench, ejector pin mechanism, wafer feeding mechanism, dispensing mechanism, CCD (Charge coupled device) optical lens and adjusting mechanism and rack and other parts and components. This paper mainly introduces the working principle and structure design of X-Y support workbench, ejector pin mechanism, wafer feeding mechanism. X-Y support workbench adopts servo motor drive, ball screw pair drive. The support platform also has adjustable height, which can adapt to different specifications of LED brackets. The mechanism has the characteristics of fast response, high precision and versatility. The lower part of the wafer feeding mechanism is a series X-Y workbench, which can adjust the position precisely. The upper part is a cantilever structure of the wafer ring seat, which is used to place and fix the wafer. (3) Simulation analysis of the welding head mechanism. This paper uses the CADCAE integrated environment to fix the plane LED multi-suction nozzle. The prototype was modeled and assembled by SolidWorks 2013, and the key parts of the welding head mechanism were analyzed by finite element analysis software ANSYS14.0 to determine its natural frequency and vibration mode. The mechanical simulation software ADAMS2012 is used to simulate and analyze the multi-suction head mechanism, and the contact force between the suction head and the solid crystal position is obtained to verify whether the mechanism meets the design requirements.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN312.8
本文编号：2231889
[Abstract]:In view of the single-suction-nozzle structure of the current crystal-fixing machine on the market, this paper designs a multi-suction-nozzle solidifying machine for welding head mechanism, which has the characteristics of continuous crystallization and solidification, and has advantages over single-suction-nozzle solidifying machine in speed and precision. The design scheme has certain theoretical significance and practical application value. The crystal fixer designed in this paper is mainly composed of seven mechanisms: multi-suction welding head mechanism, dispensing mechanism, thimble mechanism, X-Y support workbench, wafer feeding mechanism, optical lens barrel and lighting mechanism, frame and its subsidiary mechanism. The main work of this paper is as follows: (1) The design and analysis of multi-nozzle welding head mechanism work principle, including: photoelectric sensor type detection of crystal leakage or nozzle blockage, solenoid valve control of vacuum and blowing complete crystallization, spring buffer to achieve the suction nozzle "soft path" and so on. There are two working modes, one is using 8 suction nozzles structure, each step of the welding head mechanism can complete crystallization and solidification; the other is using 4 suction nozzles, 4 point head structure, the welding head mechanism can complete glue extraction, dispensing, crystallization and solidification in two steps. In structure.8 suction nozzle welding head mechanism, the rotating moving parts of the welding head mechanism are driven by DDR (Direct Drive Rotation) direct drive motor, which has the characteristics of high repetitive positioning accuracy, high acceleration and maintenance-free, and can greatly improve the performance of the welding head mechanism; the Z-direction moving parts of the welding head mechanism adopt high-precision micro LM rolling guide rail. On the premise of satisfying the precision, the quality of Z-direction motion mechanism is reduced as far as possible, and the Z-direction motion responsiveness is improved. The electric rotary joint of welding head mechanism adopts the pneumatic-electric hybrid rotary joint, which effectively solves the problem of winding of electric circuit and trachea caused by continuous rotation. (2) Other parts of mechanism design include: X-Y bracket. Workbench, ejector pin mechanism, wafer feeding mechanism, dispensing mechanism, CCD (Charge coupled device) optical lens and adjusting mechanism and rack and other parts and components. This paper mainly introduces the working principle and structure design of X-Y support workbench, ejector pin mechanism, wafer feeding mechanism. X-Y support workbench adopts servo motor drive, ball screw pair drive. The support platform also has adjustable height, which can adapt to different specifications of LED brackets. The mechanism has the characteristics of fast response, high precision and versatility. The lower part of the wafer feeding mechanism is a series X-Y workbench, which can adjust the position precisely. The upper part is a cantilever structure of the wafer ring seat, which is used to place and fix the wafer. (3) Simulation analysis of the welding head mechanism. This paper uses the CADCAE integrated environment to fix the plane LED multi-suction nozzle. The prototype was modeled and assembled by SolidWorks 2013, and the key parts of the welding head mechanism were analyzed by finite element analysis software ANSYS14.0 to determine its natural frequency and vibration mode. The mechanical simulation software ADAMS2012 is used to simulate and analyze the multi-suction head mechanism, and the contact force between the suction head and the solid crystal position is obtained to verify whether the mechanism meets the design requirements.
【学位授予单位】：广东工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN312.8
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