基于压电薄膜驱动的微定位平台建模与分析

发布时间：2018-10-08 20:14

【摘要】：设计了一种基于压电薄膜驱动梁和柔性铰链结构的3维微定位平台,并且为了准确评估平台性能提出了一种理论建模分析方法.首先,根据力平衡条件下的欧拉-伯努利梁理论和压电本构方程,得到压电薄膜梁的输出模型;然后,根据柔度矩阵方法,推导得到微定位平台的整体柔度模型;最后,综合压电薄膜梁模型和平台柔度模型得到平台的整体输出模型.通过有限元仿真分析微定位平台的输出位移和转角,并与理论计算结果进行对比验证.结果显示,仅有1个驱动器作用时,输出位移和转角理论计算结果与有限元分析结果的相对误差分别为5.4%和5.5%;3个驱动器共同作用时,输出位移理论结果与有限元分析结果的相对误差为11.6%.
[Abstract]:A 3D micro-positioning platform based on piezoelectric thin film driven beam and flexure hinge structure is designed and a theoretical modeling and analysis method is proposed to accurately evaluate the performance of the platform. Firstly, according to the Euler-Bernoulli beam theory and the piezoelectric constitutive equation, the output model of the piezoelectric thin film beam is obtained. Then, according to the flexibility matrix method, the global compliance model of the micro-positioning platform is derived. The whole output model of the platform is obtained by combining the piezoelectric thin film beam model and the platform flexibility model. The output displacement and rotation angle of the micro-positioning platform are analyzed by finite element simulation, and the results are compared with the theoretical results. The results show that the relative errors between the calculated results of output displacement and rotation angle and the results of finite element analysis are 5.4% and 5.5% respectively when there is only one driver. The relative error between the output displacement theory and the finite element analysis is 11.6.
【作者单位】：山东大学机械工程学院高效洁净机械制造教育部重点实验室;
【基金】：国家自然科学基金(61327003) 山东大学基础研究基金(2015JC034)
【分类号】：TN384

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