基于声表面波谐振器的三维纳米团簇敏感薄膜关键技术研究（英文）

发布时间：2018-10-13 09:19

【摘要】：设计了一种新型基于声表面波技术的气体传感器,理论分析了三维纳米线结构的比表面积大、灵敏度高等优点,采用具备高Q值和低插损的谐振型声表面波器件结构,制备了三维敏感膜结构的声表面波气体传感器。在此基础上,为提高吸附效应,对三维纳米线簇进行了修饰改进。通过将沙林气和芥子气注入放置了声表面波的气体传感器密闭腔体内,经过神经网络识别系统进行定性识别。实验结果表明,基于修饰改进后的纳米线簇敏感膜制备的声表面波气体传感器对给定毒气混合气体的整理识别率大于90%,能够满足通用的毒气定性检测要求。并且三维纳米声表面波气敏传感器的灵敏度和响应速度优于传统的传感装置,在识别系统加大样本数据量时,能够进一步提高识别精度。
[Abstract]:A new gas sensor based on saw technology is designed. The advantages of large specific surface area and high sensitivity of 3D nanowire structure are theoretically analyzed. The resonant saw device structure with high Q value and low insertion loss is adopted. A surface acoustic wave gas sensor with a three-dimensional sensitive membrane structure was fabricated. On this basis, to improve the adsorption effect, three dimensional nanowires were modified. By injecting sarin gas and mustard gas into the closed chamber of surface acoustic wave gas sensor, qualitative identification was carried out by neural network recognition system. The experimental results show that the surface acoustic wave gas sensor based on modified nanowire cluster sensitive film can finish and recognize the mixture gas of given gas more than 90, which can meet the requirements of general gas qualitative detection. Moreover, the sensitivity and response speed of the three dimensional surface acoustic wave gas sensor is better than that of the traditional sensor device, which can further improve the recognition accuracy when the sample data is increased in the recognition system.
【作者单位】：重庆大学光电工程学院;重庆邮电大学移动通信重点实验室;
【基金】：The Science and Technology Project Affiliated to the Education Department of Chongqing Municipality(KJ1500433)
【分类号】：TN65;TP212

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