介电超晶格填充型复合介电纳米周期光栅结构及其制备方法

发布时间：2018-10-20 14:32

【摘要】：光学表面波是一种应用非常广泛的电磁波,通常被应用于集成光路、古斯·汉森位移增强、二次谐波、高灵敏度传感器、荧光增强等领域。前人已经通过制备一维浮雕型金属光栅来激发光子晶体表面波,但是这种结构存在两大缺点,是金属对入射光的吸收较大导致损耗多,二是浮雕型结构的设计单一光学性能受限。为了克服这两大缺点,我们在此基础上设计了填充型介电光栅。本文基于严格耦合波理论模型,研究了介电超晶格填充型复合介电纳米周期光栅结构的表面波光学特性及其制备方法,通过优化的光栅材料与结构来激发介电超晶格结构的表面波,并借助该复合结构的相应结构参数的调整与优化,以达到改善表面波性能及其对应的光子晶体禁带中透射光谱性能的目标。研究工作主要分为结构设计/软件模拟和样品的实验制备与表征测试等部分,主要研究成果如下：理论与实验两方面研究了介电超晶格(光子晶体)中非辐射性光学表面波的产生及其特性,并创新性地探讨了填充型介电纳米光栅结构对该表面波的激发与耦合机制：依据导模共振的严格耦合波理论模型与分析方法,以辐射型光学表面波的具体应用为目的,设计并优化了具有重大应用价值的介电超晶格／填充型介电纳米周期光栅复合结构；借助相关模拟软件,从介电超晶格结构带隙中所出现的异常透射峰及其光谱特性与相应场分布,探讨了该复合结构中材料与多种结构参数对表面波的特性及其激发耦合的影响关系,发现该结构中的材料(包括超晶格与填充型光栅)与超晶格周期数、介电光栅的周期、光栅高度、光栅占空比等结构参数,对超窄透射峰的光谱有重要影响；通过大量的有针对性的材料与结构参数优化工作,获得了具有重大应用价值的可激发与耦合优异性能光学表面波的介电超晶格／纳米填充光栅复合结构；通过新颖和可靠的实验流程,即基于复合模板纳米压印技术与工艺,并结合电子束蒸发镀膜、高密度等离子体反应离子刻蚀、举离等工艺与实验手段,成功设计并制备了符合要求的介电超晶格／纳米填充光栅复合结构；经过对实验样品进行表征测试,获得了较理想的结构与相关性能指标。
[Abstract]:Optical surface wave is a widely used electromagnetic wave, which is usually used in the fields of integrated optical path, Gus Hansen displacement enhancement, second harmonic, high sensitivity sensor, fluorescence enhancement and so on. Previous researchers have produced one-dimensional relief metal gratings to excite the surface waves of photonic crystals. However, there are two major disadvantages in this structure, that is, the large absorption of incident light by metals leads to more loss. Second, the design of relief structure is limited by single optical performance. In order to overcome these two shortcomings, we design a filled dielectric grating. Based on the strictly coupled wave theory model, the surface wave optical properties and fabrication methods of dielectric superlattice filled composite dielectric nanocrystalline grating structures are studied in this paper. The surface wave of the dielectric superlattice structure is excited by the optimized grating material and structure, and the corresponding structural parameters of the composite structure are adjusted and optimized. In order to improve the surface wave performance and the corresponding photonic crystal band gap in the transmission spectrum performance. The research work is mainly divided into structural design / software simulation and sample preparation and characterization testing. The main results are as follows: the generation and properties of non-radiative optical surface waves in dielectric superlattices (photonic crystals) are studied theoretically and experimentally. The excitation and coupling mechanism of filled dielectric nanocrystalline grating on the surface wave is discussed innovatively. According to the theoretical model and analytical method of strictly coupled wave of guided mode resonance, the purpose of this paper is to apply the radiation type optical surface wave. The composite structure of dielectric superlattice / filled dielectric nanocrystalline periodic grating with great application value is designed and optimized. Based on the anomalous transmission peaks in the band gap of dielectric superlattices and their spectral characteristics and corresponding field distributions, the influence of material and various structural parameters on the surface wave characteristics and excitation coupling in the composite structure is discussed. It is found that the materials (including superlattice and filled grating) and the number of superlattice periods, the period of dielectric grating, the grating height, the duty cycle of the grating have important effects on the spectrum of the ultra-narrow transmission peak. Through a large number of targeted material and structural parameters optimization work, a dielectric superlattice / nanometer-filled grating composite structure, which can excite and couple excellent optical surface waves with great application value, has been obtained. Through a novel and reliable experimental process, which is based on composite template nano-imprint technology and technology, combined with electron beam evaporation coating, high-density plasma reactive ion etching, lifting and other technology and experimental means. The composite structure of dielectric superlattice / nano-filled grating has been successfully designed and fabricated, and the ideal structure and related properties have been obtained through the characterization and test of the experimental samples.
【学位授予单位】：南京大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：O441.4

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