快脉冲放电电路的延时抖动研究

发布时间：2018-10-20 14:18

【摘要】：全固态磁压缩放电电路的高重复性、长寿命等优点,使其在脉冲功率技术中的应用越来越广泛,尤其是光刻用准分子激光器。随着对光刻光源线宽、功率要求的提高,光刻用准分子激光器一般采用双腔结构,这种结构对双腔放电的延时抖动异常敏感。因此,如何降低全固态磁压缩放电电路的放电延时抖动成为这类快脉冲放电电路的重点问题。本论文基于实验室研制的用于准分子激光器的快脉冲放电电路进行研究,通过放电实验对电路的放电延时抖动进行分析,初步找出抖动原因,发现使用一种特制的两级耦合复位回路能够显著降低放电抖动。为找出复位电路的工作机理,进一步控制放电抖动,使用PSpice软件对电路进行分析。通过磁芯的实际B-H回线建立磁开关、可饱和脉冲变压器的仿真模型,使用ABM器件对充电电源进行模拟,实现了对整体脉冲电路的仿真。通过建立的电路仿真模型,对电路放电抖动的相关因素进行仿真验证,发现初始充电电压值1 V的电压波动会引起5-10 ns的放电抖动。对两级耦合复位回路进行仿真分析,证实复位回路可将放电抖动从μs量级降低到ns量级,对复位电路的工作原理进行研究,发现复位的关键因素在于复位回路可在放电过程之前有效地对各级磁芯状态实现稳定复位。通过对复位回路中复位线圈的绕组方式、绕组匝数、回路串联电感、充电电源的开关频率进行优化分析,选取复位效果最佳参数可将放电抖动降低到86 ns;通过在二级复位回路中引入合适的复位电流源,进一步将抖动控制到37 ns。同时,对主回路中谐振电感及各级磁芯绕组匝数对电路工作状态的影响进行仿真分析。为实现对充电电源的精确模拟,通过分析电路充电电源的工作过程,计算电源相关参数,设计相应的控制电路实现对充电电源的仿真。通过验证,使用精确电源模型下的仿真电路在一定程度上更加符合实际电路的工作状态。本论文建立的电路仿真模型,对低放电抖动的脉冲放电激励电路设计可提供参考。
[Abstract]:Due to the advantages of high repeatability and long life of all-solid-state magnetic compression discharge circuit, it has been widely used in pulse power technology, especially in excimer lasers used in lithography. With the improvement of the line width and power requirement of the lithography source, the excimer laser used in lithography generally adopts a dual-cavity structure, which is very sensitive to the delay jitter of the double-cavity discharge. Therefore, how to reduce the discharge delay jitter of all solid state magnetic compression discharge circuit becomes the key problem of this kind of fast pulse discharge circuit. In this paper, the fast pulse discharge circuit for excimer laser is studied in laboratory. The jitter of the circuit is analyzed by discharge experiment, and the cause of jitter is found out. It is found that using a special two-stage coupled reset loop can significantly reduce the discharge jitter. In order to find out the working mechanism of the reset circuit and further control the discharge jitter, the circuit is analyzed by PSpice software. The simulation model of magnetic switch and saturable pulse transformer is established through the actual B-H loop of magnetic core. The charging power supply is simulated by ABM device, and the whole pulse circuit is simulated. Based on the circuit simulation model, the related factors of the circuit discharge jitter are simulated and verified. It is found that the voltage fluctuation of the initial charge voltage of 1 V will cause the discharge jitter of 5-10 ns. The simulation analysis of the two-stage coupled reset circuit shows that the reset circuit can reduce the discharge jitter from 渭 s to ns. The working principle of the reset circuit is studied. It is found that the key factor of reset is that the reset loop can effectively reset the core states at all levels before the discharge process. By optimizing the winding mode, the number of turns of the reset coil, the series inductance of the circuit and the switching frequency of the charging power supply in the reset loop, Selecting the best parameters of reset effect can reduce the discharge jitter to 86 ns; and further control the jitter to 37 ns. by introducing an appropriate reset current source in the secondary reset loop. At the same time, the influence of resonant inductance and the turn number of core winding on the working state of the circuit is simulated and analyzed. In order to realize the accurate simulation of the charging power supply, by analyzing the working process of the circuit charging power supply, calculating the relevant parameters of the power supply, designing the corresponding control circuit to realize the simulation of the charging power supply. It is verified that the simulation circuit under the accurate power supply model is more in line with the working state of the actual circuit to a certain extent. The circuit simulation model established in this paper can provide a reference for the design of pulse discharge excitation circuit with low discharge jitter.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN248

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