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表面等离子激元提高半导体光提取效率的结构设计

发布时间:2018-10-26 10:28
【摘要】:近年来,Ga N基LED在LED家族中发展十分迅速,用它可以制造出蓝光LED,再配合上其他材料制造的红光和绿光LED便可以实现全彩色显示。由此可见,Ga N基LED相关技术的发展潜力巨大。但是,由于半导体材料固有的属性,Ga N基LED的效率并不十分理想,仍然存在提升性能的巨大空间。本文主要讨论采用目前热门的介质/金属纳米结构和表面等离子激元技术来提高Ga N基LED性能。研究采用现代光电子器件分析中常用的时域有限差分法,建立Ga N基LED的各种参数模型,讨论介质/金属纳米结构对Ga N基LED性能的影响,并进行结构优化,为开发新型高效的Ga N基LED提供理论支持。论文的主要内容包括:1、在LED光提取效率发展和研究现状的基础上,对LED发光效率低的原因进行了讨论,并详细介绍了目前几种提高LED光提取效率的方法及其优缺点。2、介绍了表面等离子激元的概念及发展历程,分析了表面等离子激元的电磁场性质。阐述了石墨烯的基本性质及石墨烯中的等离子激元。重点探讨了利用表面等离子激元提高LED光提取效率的原理。3、通过在银膜上表面刻蚀的长方体点阵所形成的二维光栅和在银膜下表面刻蚀一维光栅构建了混合光栅LED模型,利用时域有限差分法进行数值模拟,发现在混合光栅模型下光提取效率有了较大幅度的提高。经过对结构中的光栅周期、占空比、银膜厚度及光源深度等参数进行优化,仿真得出:在光栅周期280nm,占空比0.23,银膜厚度20nm,光源深度20nm时,光提取效率较普通LED结构提高了18倍。4、用石墨烯替代混合光栅LED模型中的金属层,以减少光在金属层中的损耗,并在石墨烯表面刻蚀Ga N光栅形成石墨烯光栅LED模型。经过数值模拟,结果表明石墨烯光栅LED模型光提取效率较混合光栅LED模型提高约1.7倍。
[Abstract]:In recent years, Ga N based LED has developed rapidly in the LED family. It can be used to produce blue light LED, and other materials to produce red and green light LED to achieve full color display. It can be seen that the development potential of, Ga N-based LED related technology is great. However, because the efficiency of, Ga N based LED is not ideal, there is still huge room for improving performance. In this paper, we mainly discuss how to improve the properties of Ga N-base LED by using the popular dielectric / metal nanostructures and surface plasmon technology. In this paper, the finite difference time-domain (FDTD) method, which is commonly used in the analysis of modern optoelectronic devices, is used to establish various parameter models of Ga N-base LED. The influence of dielectric / metal nanostructures on the properties of Ga N-based LED is discussed, and the structure is optimized. It provides theoretical support for the development of new and efficient Ga N-based LED. The main contents of this paper are as follows: 1. On the basis of the development of LED light extraction efficiency and the current research status, the reasons for the low luminescence efficiency of LED are discussed, and several methods to improve the LED light extraction efficiency are introduced in detail. 2. The concept and development of surface plasmon are introduced, and the electromagnetic properties of surface plasmon are analyzed. The basic properties of graphene and plasma excitators in graphene are described. The principle of using surface plasma excitators to improve the efficiency of LED extraction is discussed. 3. The LED model of hybrid gratings is constructed by etching the two dimensional gratings on the surface of the silver film and the one dimensional grating etched on the surface of the silver film by using the cuboid lattice etched on the surface of the silver film. The finite difference time-domain (FDTD) method is used to simulate the optical extraction efficiency. It is found that the optical extraction efficiency is greatly improved under the hybrid grating model. The parameters of grating period, duty cycle, silver film thickness and light source depth are optimized. The simulation results show that when grating period is 280 nm, duty cycle is 0.23, silver film thickness is 20 nm, and light source depth is 20nm, The light extraction efficiency is 18 times higher than that of ordinary LED structure. Graphene is used to replace the metal layer in the mixed LED model to reduce the loss of light in the metal layer, and the Ga N grating is etched on the graphene surface to form the graphene grating LED model. The numerical simulation results show that the light extraction efficiency of the graphene grating LED model is about 1.7 times higher than that of the mixed grating LED model.
【学位授予单位】:燕山大学
【学位级别】:硕士
【学位授予年份】:2015
【分类号】:O539;TN312.8

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