浸没光刻机浸液温控系统设计分析与实现
发布时间：2018-10-30 11:35
【摘要】：浸没光刻机是应用于集成电路制造的关键设备,其浸没系统的浸液温度是影响其性能指标的关键因素之一。浸液温度控制的性能主要由浸液系统的结构与浸液系统的控制算法决定,本文主要研究浸液系统的结构。主要研究工作和结论如下:提出了使用冷却水通过热交换器控制浸液温度和调节冷却水的流量控制浸液温度的稳定性的浸液温控原理。与通过直接加热和制冷方式控制浸液温度的原理相比,有效地利用了工厂的冷却水系统,无需制冷加热装置,降低了用户使用成本,且可以获得更高的温度稳定性和抗干扰能力。提出了在浸液温控回路中嵌套循环回路的初步技术方案,使部分浸液一直处于温控状态,增大回路中浸液流量,从而使其抗环境温度变化产生的扰动的能力更强,同时,将流量伺服阀设计在循环回路中对出口流量进行调节,避免了对出口温度的影响。并建立了实验装置对该技术方案进行了实验验证,实验数据表明,该技术方案可以获得更好的温度稳定性。样机设计将温控系统与浸液处理系统进行了集成,分析了污染处理器件、去气器件和流量泵等产生热量对浸液温度的干扰,将上述器件设计在循环回路的前端,有效降低了其对温控控制的影响。完成了结构详细设计,并实现了样机的制造集成。样机的测试结果表明该系统达到了22±0.01℃@30分钟的温度控制性能,实现了用户需求的主要功能,并通过了用户的测试,为浸没光刻机浸液控制系统的研发奠定了良好的技术基础。
[Abstract]:Immersion lithography machine is a key equipment used in integrated circuit manufacturing. The immersion temperature of immersion system is one of the key factors affecting its performance. The performance of temperature control is mainly determined by the structure of the immersion system and the control algorithm of the immersion system. In this paper, the structure of the immersion system is studied. The main research work and conclusions are as follows: the principle of controlling the temperature of leachate by using cooling water through heat exchanger and regulating the flow rate of cooling water to control the stability of temperature is put forward. Compared with the principle of controlling the immersion temperature by direct heating and refrigeration, the cooling water system of the factory is utilized effectively, without the need of refrigeration and heating device, and the cost of the user is reduced. And can obtain higher temperature stability and anti-interference ability. A preliminary technical scheme of nested circulating loop in the temperature control loop of dipping fluid is put forward, which makes part of the leachate in the state of temperature control always in the state of temperature control, increases the flow rate of the leachate in the loop, so that it has a stronger ability to resist the disturbance caused by the change of ambient temperature, at the same time, The flow servo valve is designed to adjust the outlet flow rate in the circulation loop to avoid the influence on the outlet temperature. The experimental results show that the scheme can achieve better temperature stability. The prototype design integrates the temperature control system with the immersion treatment system, analyzes the interference of heat produced by the pollution treatment device, degassing device and flow pump on the immersion temperature, and designs the above devices in the front end of the circulation loop. It can effectively reduce its influence on temperature control. The structure is designed in detail, and the manufacturing integration of the prototype is realized. The test results of the prototype show that the system achieves the temperature control performance of 22 卤0.01 鈩，
本文编号：2299896
[Abstract]:Immersion lithography machine is a key equipment used in integrated circuit manufacturing. The immersion temperature of immersion system is one of the key factors affecting its performance. The performance of temperature control is mainly determined by the structure of the immersion system and the control algorithm of the immersion system. In this paper, the structure of the immersion system is studied. The main research work and conclusions are as follows: the principle of controlling the temperature of leachate by using cooling water through heat exchanger and regulating the flow rate of cooling water to control the stability of temperature is put forward. Compared with the principle of controlling the immersion temperature by direct heating and refrigeration, the cooling water system of the factory is utilized effectively, without the need of refrigeration and heating device, and the cost of the user is reduced. And can obtain higher temperature stability and anti-interference ability. A preliminary technical scheme of nested circulating loop in the temperature control loop of dipping fluid is put forward, which makes part of the leachate in the state of temperature control always in the state of temperature control, increases the flow rate of the leachate in the loop, so that it has a stronger ability to resist the disturbance caused by the change of ambient temperature, at the same time, The flow servo valve is designed to adjust the outlet flow rate in the circulation loop to avoid the influence on the outlet temperature. The experimental results show that the scheme can achieve better temperature stability. The prototype design integrates the temperature control system with the immersion treatment system, analyzes the interference of heat produced by the pollution treatment device, degassing device and flow pump on the immersion temperature, and designs the above devices in the front end of the circulation loop. It can effectively reduce its influence on temperature control. The structure is designed in detail, and the manufacturing integration of the prototype is realized. The test results of the prototype show that the system achieves the temperature control performance of 22 卤0.01 鈩，
本文编号：2299896
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