多维光存储记录符光学特性及其基于相变光刻制备方法研究

发布时间：2018-10-30 18:00

【摘要】：现在研究热门的超高密度光存储也只是研究记录符一个维度的变化,如只研究深度D变化或者角度θ变化。本文设计并描述了一种能够同时利用深度和角度来调制光信号的多维记录符,而且首次提出了利用Stokes参量来同时表征其深度和角度的变化的方法,而达到增大光学存储密度的目的。进行相关的计算表明:Stokes参量信号能够很好的表征该多维记录符,其中Stokes参量中的S0和S1与多维记录符的角度以及深度有很大的关联。记录符深度和角度对于S1影响的比重接近,而深度对于S0的影响远大于角度。利用S0和S1关于深度以及角度的单调递增区间,记录符深度和角度能够很好的区分。此外,引入扫描过程中脉冲宽度ΔW,可以将区别的角度范围增大一倍,这是由于角度关于ΔW的单调递增区间与S1单调递增区间不同,采用该方法能够区别的角度范围增大到[-90°,90°],这比现在只利用光强检测的角度范围增大了4倍。而且在该单个多维记录符的基础上,设计并计算了更多维度的组合记录符及其阵列结构,仍旧采用Stokes参量来表征其光学特性。此外,为了制备该多维记录符结构,设计了一种简易的相变光刻系统,并成功验证了该系统在Ge2Sb2Te5非晶薄膜上制备出多维光存储记录符图案的可行性。系统中基于相变材料Ge2Sb2Te5的光学特性,提出了一个快速、高精度且实现成本低的自动聚焦方法。最终利用该系统成功地得到了线宽为0.69μm的GST晶化图形,该尺寸远小于激光聚焦光斑。而且利用该系统获得的晶化的Ge2Sb2Te5薄膜经过1wt%的NaOH溶液刻蚀后,成功制备出记录符图案的坑结构。
[Abstract]:Now the hot ultra-high density optical storage is only studying the change of one dimension of the recorder, such as the depth D change or angle 胃 change. In this paper, we design and describe a multidimensional recorder which can modulate the optical signal simultaneously with depth and angle, and propose for the first time a method to represent the variation of depth and angle by using Stokes parameters simultaneously. The optical storage density is increased. The correlation calculation shows that the Stokes parameter signal can well represent the multidimensional record, and the S0 and S1 of the Stokes parameter are closely related to the angle and depth of the multidimensional recorder. The specific gravity of the effect of the depth and angle of the recorder on S1 is similar, while the effect of depth on S0 is much greater than that on the angle. By using the monotone increasing interval of depth and angle between S _ 0 and S _ 1, the depth and angle of the recorder can be distinguished well. In addition, by introducing the pulse width 螖 W in the scanning process, the angle range can be doubled, which is due to the difference between the monotone increasing interval of angle 螖 W and the monotone increasing interval of S1. The angle range that can be distinguished by this method is increased to [-90 掳, 90 掳], which is four times larger than that of only using light intensity detection. On the basis of the single multidimensional recorder, more dimensional combinatorial recorders and their array structures are designed and calculated, and Stokes parameters are still used to characterize their optical properties. In addition, a simple phase-change lithography system is designed to prepare the multi-dimensional recorder structure, and the feasibility of preparing the multi-dimensional optical recording character pattern on the Ge2Sb2Te5 amorphous film is verified successfully. Based on the optical properties of phase change material (Ge2Sb2Te5), a fast, high precision and low cost automatic focusing method is proposed. Finally, the GST crystallization pattern with a linewidth of 0.69 渭 m was successfully obtained by using the system, which is much smaller than the laser focusing spot. Furthermore, the Crystallized Ge2Sb2Te5 films obtained by this system were etched by 1wt% NaOH solution, and the pit structure of the recording character pattern was successfully prepared.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TN305.7

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